A mura vision automatic detection method and device of a tft-lcd process
An automatic detection and visual technology, applied in the direction of optical testing flaws/defects, optics, instruments, etc., can solve the problems that manual detection methods are difficult to meet product quality and production efficiency, there is no unified judgment standard for defect levels, and the increase of liquid crystal displays, etc. Achieve the effect of avoiding a large number of floating-point operations, facilitating subsequent processing, and improving performance
Active Publication Date: 2016-03-30
苏州富鑫林光电科技有限公司
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[0002] With the development of liquid crystal displays (LCDs) in the direction of large size, lightness, low power consumption, and high resolution, the size of glass substrates and related optical components is gradually increasing, and their thickness is decreasing, resulting in various realities of liquid crystal displays. The probability of uneven defects (Mura) is greatly increased. The traditional human eye defect detection method is seriously affected by human subjective factors and the external environment. There is no uniform judgment standard for defect levels. It makes it difficult for manual inspection methods to meet the requirements of product quality and production efficiency
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[0038] refer to Figure 1-2 , the MURA visual automatic inspection device for the TFT-LCD process includes a fixing device 1, a CCD camera device 2, a lens 3, and a grid angle standard Figure 4 and the computer 5, the fixture 1 is provided with a fixed fixture 11 for the measured object, and the grid angle standard Figure 4 Laying on the upper surface of the fixed fixture 11 of the measured object, the CCD camera device 2 is installed on the fixed device 1, and is arranged above the fixed fixture 11 of the measured object, the lens 3 is set on the CCD camera device 2, and the CCD camera device 2 passes through The connection line is connected with the calculation card provided on the computer 5 .
[0039] Wherein, the computer 5 is provided with a low-pass filter based on discrete Fourier transform and a GPU.
[0040] refer to Figure 3-7 , a MURA visual automatic detection method for TFT-LCD process, which includes
[0041] Image preparation process:
[0042] 1) Place ...
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The invention discloses a MURA visual automatic detection device for TFT-LCD manufacturing process, which includes a fixing device, a CCD camera, a lens and a grid angle standard map, the fixing device is provided with a fixed jig for the measured object, and the square The grid angle standard map is laid on the upper surface of the fixed fixture of the measured object, the CCD imaging device is installed on the fixed device, and is arranged above the fixed fixture of the measured object, and the lens is arranged on the fixed fixture. On the CCD camera device, the CCD camera device is connected with the calculation card provided on the computer through a connection line. The invention can be compatible with different environments to identify and process MUARs of TFT-LCD manufacturing processes of different types and sizes, realize intelligent detection, and save human capital.
Description
technical field [0001] The invention relates to a detection device and method of a flat panel display, in particular to a MURA visual automatic detection method and device of a TFT-LCD manufacturing process. Background technique [0002] With the development of liquid crystal displays (LCDs) in the direction of large size, light weight, low power consumption, and high resolution, the size of glass substrates and related optical components is gradually increasing, and their thickness is decreasing, resulting in various realities of liquid crystal displays. The probability of uneven defects (Mura) is greatly increased. The traditional human eye defect detection method is seriously affected by human subjective factors and the external environment. There is no uniform judgment standard for defect levels. It is difficult to make manual detection methods meet the requirements of product quality and production efficiency. Therefore, it is an urgent requirement for the development ...
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IPC IPC(8): G01N21/94G02F1/13
Inventor 许照林冯海丁吴全玉
Owner 苏州富鑫林光电科技有限公司