A device for in-situ variable temperature measurement spectrum in transmission electron microscope

A technology of transmission electron microscope and measurement spectrum, which is used in measurement devices, material analysis using wave/particle radiation, instruments, etc. Easy to install effects

Active Publication Date: 2015-10-28
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Aiming at the problem that the existing in-situ transmission electron microscope technology cannot change the temperature of the sample to be measured in situ and measure its spectrum, the present invention provides a device for in-situ temperature-variable temperature measurement spectrum in the transmission electron microscope that can solve this problem

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  • A device for in-situ variable temperature measurement spectrum in transmission electron microscope
  • A device for in-situ variable temperature measurement spectrum in transmission electron microscope

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Embodiment Construction

[0016] Hereinafter, the embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the embodiments in the application and the features in the embodiments can be combined with each other arbitrarily if there is no conflict.

[0017] Such as Figure 1~2 As shown, the device for in-situ variable temperature measurement of spectra in transmission electron microscopy of this embodiment includes a sample holder 1, a hollow sample rod 2, a hollow interface holder 3, an adiabatic vacuum interface 4, a vacuum electrical connector 5, a vacuum optical fiber flange 6, a refrigerant Source 7, temperature controller 8 and spectrometer 9. The sample holder 1 includes a support frame 11, a heat conducting block 12, a temperature measuring element 13, a heating resistance wire 14, a refrigeration tube 15 and an optical fiber 16. The sample holder 1 is set in the hollow sample rod 2. At one end, the hollow interface seat 3...

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Abstract

The invention discloses an in-situ varying temperature spectral measurement device in a transmission electron microscope. A measured sample is cooled through a refrigerant cycle and is heated by heating a resistance wire, the temperature of the measured sample is measured through a temperature measurement element and is controlled through a temperature control instrument, and the temperature of the measured sample is changed and controlled in situ in the transmission electron microscope. Then, the measured sample is bombarded by using electron beams of the transmission electron microscope, namely the spectral quality of the measured sample can be measured under different temperature conditions in situ. Meanwhile, the transmission electron microscope can record the structure and the component information of the measured sample in the process, so that the performance of the measured sample is comprehensively characterized. The problem that the temperature of the measured sample cannot be changed in situ and the spectrum cannot be measured in a conventional in-situ transmission electron microscope technology are solved, transformation of the transmission electron microscope body is not involved, and the device has the advantages of low cost and simplicity in installation and use.

Description

Technical field [0001] The invention belongs to the technical field of transmission electron microscope matching accessories, and particularly relates to a device for changing the temperature of a sample to be tested in situ and measuring its spectrum in a transmission electron microscope. Background technique [0002] The in-situ transmission electron microscope technology not only has the structure characterization and composition analysis functions of the transmission electron microscope, but also can measure the performance of the sample in situ on the transmission electron microscope. The existing technology can realize the measurement of the optical, electrical, mechanical and other properties of nanomaterials in situ on an electron microscope, but it is not yet possible to change the temperature of the tested sample in situ and measure its spectrum. Summary of the invention [0003] Aiming at the problem that the existing in-situ transmission electron microscope technology ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/00
Inventor 杨是赜王恩哥田学增许智白雪冬
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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