Rocking Mass Enhanced Piezoelectric Bulk Acoustic Solid Wave Disc Microgyroscope

Abstract

The invention discloses a swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope which comprises a piezoelectric disc, a swing quality body, four electrodes and a fixed clamping device, wherein the electrodes comprise two detection electrodes and two drive electrodes; the swing quality body is positioned in the center of the piezoelectric disc and is vertically fixed; the four electrodes are uniformly distributed along the periphery of the surface of the disc; the drive electrodes and the detection electrodes are arranged at intervals; the fixed clamping device is used for fixing the disc at the uniform intervals of the outer side at the periphery of the disc and is tightly clamped at the periphery of the disc. The disc structure is highly symmetrical, and a driving mode and a detection mode are just in the directions of the drive electrodes and the detection electrodes respectively. Only one pair of detection electrodes is used, and detection of angular velocity along the columnar direction of the swing quality body is promoted. The swing quality enhanced piezoelectric acoustic solid fluctuation disc micro-gyroscope is simple in structure and small in size, has the characteristics of high Q value and the like, and vacuum encapsulation is not needed.

Description

technical field [0001] The invention relates to a solid-wave gyroscope in the field of micro-electromechanical technology, specifically, it is a piezoelectric-driven piezoelectric detection disc micro-mechanical gyroscope based on the solid-wave principle. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of control, navigation and positioning. With the development of national defense technology and aerospace, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro-gyroscope based on MEMS (Micro Electro Mechanical Systems) technology is processed by micro-nano batch manufacturing technology, and its cost, size, and power consumption are very low, and its environment...

AI Technical Summary

Problems solved by technology

[0005] This technology has the following disadvantages: the micro-gyroscope with a rocking mass body has extremely high requirements on processing symmetry, once there is a little error, the working mode will deviate greatly from the expected; the vibration of the driving mode and the detection mode is always along the direction with the largest stiffness Therefore, the vibration antinodes of these two modes are not at the sides of the square, but at the four corners, which is very unfavorable for driving and detection; in addition, this dual-axis detection method is very unfavorable for decoupling, once the two modes Angular velocities in two directions are coupled together. Since the antinodes of the modal vibration are in the square corners, the detection electrodes cannot distinguish and detect the components in each direction; in addition, the gyroscope is too large, which limits its use in many small volumes. conditional application

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