Interference objective driving device

A technology of driving device and objective lens, which is applied in the direction of measuring device, optical device, instrument, etc., can solve problems such as unsatisfactory, and achieve the effects of low cost, large displacement range, and reduced damage probability
CN103604390AActive Publication Date: 2014-02-26SUZHOU UNIV
4 Cites 3 Cited by

Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
SUZHOU UNIV
Publication Date
2014-02-26

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
Patent Text Reader

Abstract

The invention discloses an interference objective driving device. The interference objective driving device comprises a body, a mounting rack and a fixing rack. A through chamber is formed in the body, and an amplifying mechanism is arranged in the chamber and comprises arc metal frames arranged oppositely and metal plate frames which are integrally formed with the arc metal frames and arranged oppositely. The metal plate frames are arranged between the arc metal frames and are perpendicular to the arc metal frames. A piezoelectric ceramic element, a pre-tensioning jackscrew and a roll ball are also arranged in the chamber. The piezoelectric ceramic element is integrally connected between the metal plate frames, the pre-tensioning jackscrew is in threaded connection with the body, the roll ball is matched with the pre-tensioning jackscrew, and the roll ball abuts against the wall face of one side, integrally connected with the metal plate frames, of the piezoelectric ceramic element. According to the interference objective driving device, the amplifying mechanism is used for amplifying infinitesimal displacement of the piezoelectric ceramic element, and therefore a larger displacement range is obtained for the interference objective driving device.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the field of micro-drive applications, in particular to an interference objective lens drive device. Background technique

[0002] The surface quality of mechanical parts not only directly affects the performance of parts, but also affects the quality, reliability and life of products. With the rapid development of modern technology, many high-precision products have higher and higher requirements for surface processing quality, and ultra-precision processing technology has become the forefront of modern technology. Ultra-precision detection technology is a high-tech technology developed in parallel with ultra-precision machining technology. Accurate and reliable measurement of the micro-topography of ultra-precision surfaces has become a key problem to be solved in the field of ultra-precision machining.

[0003] The interference objective lens is an instrument that uses the principle of light wave interference to detect the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More