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Inspection device

An inspection device and image technology, applied in photovoltaic power generation, optical testing flaws/defects, etc., to achieve the effect of high-precision defect detection

Inactive Publication Date: 2016-04-27
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The present invention was made to solve the above-mentioned problems. One of the objects of the present invention is to provide an inspection device. Defect detection, thus more suitable for practical

Method used

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no. 1 Embodiment approach

[0067] First, refer to figure 1 The overall configuration of the visual inspection device 100 according to the first embodiment of the present invention will be described. In the first embodiment, an example in which the present invention is applied to an appearance inspection device 100 for inspecting defects of an antireflection film formed on the surface of a solar cell (surface defect of a solar cell) will be described.

[0068] The appearance inspection device 100 of the first embodiment is an inspection device that is installed on a production line in the production process of the solar cell 1 and performs an inline inspection. The solar cell 1 includes: a semiconductor substrate 2 (hereinafter referred to as substrate 2 ); and an antireflection film 3 formed on a surface (light-receiving surface) of the substrate 2 . in addition, figure 1 In the figure, for the sake of convenience, the thickness of the solar cell 1 is enlarged to schematically show each layer (the sub...

no. 2 Embodiment approach

[0110] Second, refer to figure 1 , Figure 6(a), Figure 6(b) to Figure 9 The appearance inspection device 200 according to the second embodiment of the present invention will be described. In the second embodiment, an example in which a defect inspection is performed for each partial image of a captured image in addition to the configuration of the first embodiment described above will be described. In addition, in the second embodiment, the device configuration is the same as that of the visual inspection device 100 of the first embodiment described above, and therefore description thereof will be omitted. In addition, the appearance inspection apparatus 200 is an example of the "inspection apparatus" of this invention.

[0111] Such as Figure 8 As shown, the appearance inspection device 200 of the second embodiment (refer to figure 1 ) of the control unit 230 (refer to figure 1 ), the part images 80 of various illumination colors are respectively obtained for a plurali...

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Abstract

The invention relates to an inspection apparatus, wherein the defect detection is realized accurately even when the thickness of an anti-reflection film is uneven. The appearance inspection apparatus comprises a lighting part used for irradiating lights of different colors in regions of different wavelengths, a shooting part used for irradiating solar cell units by means of the above lights, and a control part used for acquiring images shot by the solar cell units, and checking the solar cell units according to the reflection strength or the thickness of the anti-reflection film.

Description

technical field [0001] The invention relates to an inspection device, in particular to an inspection device for a solar battery unit (cell). Background technique [0002] Conventionally, an inspection device for a solar battery cell is known (for example, refer to Patent Document 1). [0003] The above-mentioned patent document 1 discloses an appearance inspection device of a solar battery unit, including: an illuminating device, illuminating light with a wavelength in the infrared region, and a charge-coupled device (chargecoupled device, CCD) camera (camera) sensitive to the near-infrared region ( camera department). Infrared light irradiated from the lighting device passes through the solar cell, but when there is a defect (crack) inside the solar cell, the infrared light diffuses due to refraction or diffraction around the defect. As a result, the defective portion inside the solar battery cell is detected as a difference in signal intensity (brightness and darkness) o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/95
CPCY02E10/50
Inventor 高见芳夫坂内尚史
Owner SHIMADZU SEISAKUSHO CO LTD
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