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Inspection apparatus

A technology for inspecting devices and images, applied in photovoltaic power generation, optical testing for flaws/defects, etc., to achieve high-precision defect detection

Inactive Publication Date: 2014-03-26
SHIMADZU CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The present invention was made to solve the above-mentioned problems. One of the objects of the present invention is to provide an inspection device. Defect detection, thus more suitable for practical

Method used

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no. 1 Embodiment approach

[0067] First, refer to figure 1 The overall configuration of the visual inspection apparatus 100 according to the first embodiment of the present invention will be described. In the first embodiment, an example in which the present invention is applied to the appearance inspection apparatus 100 that inspects defects of the anti-reflection film formed on the surface of the solar battery cell (surface defect of the solar battery cell) is described.

[0068] The appearance inspection device 100 of the first embodiment is an inspection device that is installed on a production line in the production step of the solar cell unit 1 and performs an in-line inspection. The solar battery cell 1 includes a semiconductor substrate 2 (hereinafter referred to as a substrate 2); and an anti-reflection film 3 formed on the surface (light-receiving surface) of the substrate 2. In addition, figure 1 Here, for convenience, the thickness of the solar cell 1 is enlarged to schematically show each laye...

no. 2 Embodiment approach

[0110] Secondly, refer to figure 1 , Figure 6(a), Figure 6(b)~Figure 9 The appearance inspection apparatus 200 of the second embodiment of the present invention will be described. In the second embodiment, an example of a configuration in which, in addition to the configuration of the first embodiment described above, a defect inspection is performed for each partial image of the captured image will be described. In addition, in the second embodiment, the device configuration is the same as that of the appearance inspection device 100 of the above-mentioned first embodiment, so the description is omitted. In addition, the appearance inspection apparatus 200 is an example of the "inspection apparatus" of the present invention.

[0111] Such as Figure 8 As shown, the appearance inspection apparatus 200 of the second embodiment (refer to figure 1 ) Of the control unit 230 (refer to figure 1 ), the part images 80 of various illumination colors are respectively obtained for a plural...

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Abstract

The invention relates to an inspection apparatus, wherein the defect detection is realized accurately even when the thickness of an anti-reflection film is uneven. The appearance inspection apparatus comprises a lighting part used for irradiating lights of different colors in regions of different wavelengths, a shooting part used for irradiating solar cell units by means of the above lights, and a control part used for acquiring images shot by the solar cell units, and checking the solar cell units according to the reflection strength or the thickness of the anti-reflection film.

Description

Technical field [0001] The invention relates to an inspection device, in particular to an inspection device for solar cells. Background technique [0002] Conventionally, inspection devices for solar battery cells are well known (for example, refer to Patent Document 1). [0003] The above-mentioned Patent Document 1 discloses an appearance inspection device of a solar battery cell, including: an illuminating device, illuminating light of a wavelength in the infrared region, and a charge coupled device (CCD) camera sensitive to the near infrared region. ) (Camera Department). Infrared light irradiated from the lighting device passes through the solar cell, but when there is a defect (crack) inside the solar cell, the infrared light diffuses due to refraction or diffraction around the defect. As a result, the defective portion inside the solar battery cell is detected as a difference in signal intensity (brightness and darkness) in the captured image by the charge-coupled device c...

Claims

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Application Information

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IPC IPC(8): G01N21/95
CPCY02E10/50
Inventor 高见芳夫坂内尚史
Owner SHIMADZU CORP
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