Chemical solution recycling device suitable for square substrate
A recovery device and chemical liquid technology, which is applied in the field of chemical liquid recovery devices, can solve the problems of chemical liquid pollution, dilution, and inability to reuse, and achieve the effects of rapid response, simple structure, and convenient installation
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0021] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0022] Such as figure 1 , figure 2 As shown, the present invention includes a square base plate 1, a chip holder 2, a CUP 3, a liquid receiving tank 5, a cylinder 7, a motor 8 and a table panel 14, wherein the liquid receiving tank 5 is fixed on the upper surface of the table panel 14, and the liquid receiving tank 5 The bottom surface of the bottom surface extends axially upwards, forming a hollow first protrusion 18 and a second protrusion 19 from the inside to the outside. The first protrusion 18 is located in the center of the liquid receiving tank 5, the central axis and the central axis of the liquid receiving tank 5 Collinear, the second protrusion 19 is located at the periphery of the first protrusion 18, and is concentrically arranged with the first protrusion 18, and an inner groove 17 is formed between the first protrusion 18 and the second protr...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com