A chemical liquid recovery device suitable for square substrates

Abstract

The invention belongs to the field of semiconductor industry wafer wet processing, and particularly relates to a chemical solution recycling device suitable for a square substrate. The chemical solution recycling device comprises a piece bearing platform for fixing and rotating the square substrate, a CUP, a solution containing groove, an air cylinder, a motor and a deck plate, the solution containing groove is formed in the deck plate, the piece bearing platform driven by the motor is arranged inside the solution containing groove, the square substrate is located on the piece bearing platform, any two opposite corners of the square substrate are positioned through blocking columns on the piece bearing platform, the CUP driven by the air cylinder to ascend and descend is arranged between the solution containing groove and the piece bearing platform, the solution containing groove is divided into an outer groove body for recycling the chemical solution and an inner groove body for recycling the cleaning solution through the CUP, and each groove body is provided with a drainage port. The piece bearing platform is provided with the blocking columns for positioning the square substrate, and the chemical solution can flow down along the four edges of the square substrate and can be recycled in a classified mode. The separation between the chemical solution and the cleaning solution can be controlled by through the ascending and descending of the CUP, the chemical solution is recycled through different channels, and the pollution and the dilution problems of the chemical solution are reduced.

Description

technical field [0001] The invention belongs to the field of wafer wet processing in the semiconductor industry, in particular to a chemical liquid recovery device suitable for square substrates. Background technique [0002] At present, chemical liquids are often used in the wafer wet processing process in the semiconductor industry, and how to realize the non-polluting and non-diluted recovery and reuse of chemical liquids is an inevitable problem. In the prior art, it is difficult to recover the chemical liquid, which is likely to cause the chemical liquid to be polluted and diluted, and it is more difficult to process and recycle the chemical liquid for the square substrate. Therefore, how to avoid contamination and dilution of the chemical solution during the recycling process after processing the square substrate has become an urgent problem to be solved. Contents of the invention [0003] In order to solve the problem that the chemical liquid cannot be reused due t...

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Problems solved by technology

[0003] In order to solve the problem that the chemical liquid cannot be reused due to contamination and dilution during the recovery process when processing square substrates, the purpose of the present invention is to provide a chemical liquid recovery device suitable for square substrates

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