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Non-heat elastic damping torsional micro-electro-mechanical resonance device

A thermoelastic, MEMS technology used in electrical components, impedance networks, etc.

Inactive Publication Date: 2014-04-30
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, ignoring bending deformation is incorrect in many cases

Method used

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  • Non-heat elastic damping torsional micro-electro-mechanical resonance device
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  • Non-heat elastic damping torsional micro-electro-mechanical resonance device

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Embodiment Construction

[0019] The technical solutions of the present invention will be further described below in conjunction with the embodiments and the accompanying drawings.

[0020] The non-thermoelastic damping torsional MEMS resonant device of the present invention includes a substrate 4, a first driving electrode 5 arranged on the substrate 4, a second driving electrode 6, a sensing electrode 7, and a first torsion support beam 2 located on the same axis and the second torsion support beam 3, and the torsion plate 1 jointly supported by the first torsion support beam 2 and the second torsion support beam 3. The common axis where the first torsion support beam 2 and the second torsion support beam 3 are located constitutes a torsion axis, and the torsion plate 1 can rotate around the torsion axis. The first driving electrode 5 and the second driving electrode 6 are arranged on the same side of the torsion axis, the sensing electrode 7 is arranged on the other side of the torsion axis, and the...

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Abstract

The invention discloses a non-heat elastic damping torsional micro-electro-mechanical resonance device which comprises a base, a first driving electrode, a second driving electrode, a sensing electrode, a first torsional supporting beam, a second torsional supporting beam and a torsional flat plate. The first driving electrode, the second driving electrode, the sensing electrode, the first torsional supporting beam, the second torsional supporting beam and the torsional flat plate are arranged on the base. The first torsional supporting beam and the second torsional supporting beam are arranged on the same axis. The torsional flat plate is supported by the first torsional supporting beam and the second torsional supporting beam together. The torsional flat plate can rotate around the torsional axis formed by the first torsional supporting beam and the second torsional supporting beam. The first driving electrode and the second driving electrode are arranged on the same side of the torsional axis. The sensing electrode is arranged on the other side of the torsional axis. The horizontal section area of the first torsional supporting beam and the horizontal section area of the second torsional supporting beam are equal. In the micro-electro-mechanical resonance device, the driving electrodes can generate pure torsional moment which causes pure torsional deforming, and pure torsional deforming does not cause heat elastic damping.

Description

technical field [0001] The invention in this paper belongs to the field of micro-electro-mechanical systems (MEMS), and relates to a torsional micro-electro-mechanical resonant device with no thermoelastic damping. Background technique [0002] Quality factor is an important performance index of MEMS resonant devices. For devices encapsulated in vacuum, thermoelastic damping is one of the most important energy dissipation factors. Thermoelastic damping is due to the compression and stretching of the mechanical structure under the action of stress, which causes the volume to change, resulting in heat generation and dissipation, that is, the vibration energy of the resonant device becomes heat energy and dissipates. For torsional resonant devices, the current general view is that the results of elastic mechanics show that [S.A.Chandorkar, R.N.Candler, A.Duwel, R.Melamud, M.Agarwal, K.E.Goodson, T.W.Kenny, Multimode thermoelastic dissipation, Journal of Applied Physics ,105(2...

Claims

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Application Information

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IPC IPC(8): H03H9/24
Inventor 李普方玉明台永鹏
Owner SOUTHEAST UNIV
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