A detection device for a vacuum box alignment system
A detection device and vacuum technology, which is applied to liquid tightness measurement using liquid/vacuum degree, and can solve the problems of unreliable vacuum degree detection by measuring the increase and deceleration rate of fluid, optical and other directions, and achieve enhanced box alignment efficiency, The effect of improving detection efficiency, improving vacuum degree and safety
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[0028] The specific implementation manner of the present invention will be further described below in conjunction with the drawings and embodiments. The following examples are only used to illustrate the present invention, but not to limit the scope of the present invention.
[0029] like figure 1 As shown, the embodiment of the present invention provides a detection device for a vacuum box alignment system, comprising: a vacuum box alignment chamber 1, which communicates with multiple vacuum pipelines 2;
[0030] Supply gas source 3, which communicates with vacuum chamber 1;
[0031] Liquid crystal separation and discharge device, which communicates with the vacuum pipeline 2, and is used to discharge the liquid crystal remaining in the vacuum pipeline 2;
[0032] The pipeline detection device is used to collect the gas source quantity at the connection of the vacuum pipeline 2, and judge whether the vacuum pipeline leaks.
[0033] The detection device of the vacuum box ma...
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