A method and system for automatically laying out positions of thermal vias in a 3D integrated circuit
An integrated circuit, automatic layout technology, used in electrical digital data processing, special data processing applications, instruments, etc.
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[0042] The present invention will be further described below in conjunction with the accompanying drawings.
[0043] Such as figure 1 Shown is a schematic cross-sectional view of a 3D integrated circuit chip. The 3D integrated circuit in the present invention is a three-dimensional chip structure. figure 1 Among them, 1 is signal TSV, 2 is thermal via a, 3 is thermal via b, 6 is the top chip, 7 is the bottom chip, 8 is the chip standard unit, 9 is the metal connection layer, and 10 is the silicon substrate.
[0044] Each layer in the 3D chip is a 2D chip, and is connected vertically by the TSV shown in 1, which includes the top chip 6 and the low layer chip 7; the standard unit 8 is the basic component for realizing signal interconnection in the integrated circuit, Each standard unit 8 is interconnected through metal interconnection lines 9; the top chip 6 and the bottom chip 6 need to be connected through 1, 1. This TSV is a through-silicon hole passing through two adjacen...
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