Cylindrical surface interference splicing measuring device and adjusting method thereof

A technology of measuring device and adjustment method, applied in the direction of measuring device, using optical device, instrument, etc., can solve the problems of installation and adjustment mechanism and its adjustment method that have not been reported in relevant literature, and achieve the effect of accurate adjustment

Inactive Publication Date: 2014-08-20
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, there are no relevant literature reports on the installation and adjustment m...

Method used

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  • Cylindrical surface interference splicing measuring device and adjusting method thereof
  • Cylindrical surface interference splicing measuring device and adjusting method thereof
  • Cylindrical surface interference splicing measuring device and adjusting method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0031] Such as figure 1As shown, a cylindrical interference splicing measurement device includes an interferometer (1), a support (2), a six-dimensional adjustment frame (3), a CGH (4), a one-dimensional guide rail platform (5), and a test piece ( 6), four-dimensional adjustment mechanism (7), five-dimensional adjustment mechanism (8), electric control lifting platform (9). It is characterized in that: the interferometer (1) and the one-dimensional guide rail platform (5) are installed on the support (2), the six-dimensional adjustment frame (3) is installed on the one-dimensional guide rail platform (5), and the CGH (4) is installed On the six-dimensional adjustment frame (3), the exit optical axis of the interferometer (1) can pass through the center of the CGH (4), and the distance between the CGH (4) and the measured object (6) can be adjusted; by the four-dimensional The adjustment mechanism (7), the five-dimensional adjustment mechanism (8) and the electric control lift...

Embodiment 2

[0039] A method for adjusting a cylindrical surface interference splicing measurement device, used for adjusting the cylindrical surface interference splicing measurement device according to claim 1, characterized in that the operation steps are as follows:

[0040] ① Install and adjust CGH (4): CGH (4) is installed on the six-dimensional adjustment frame (3), and the six-dimensional adjustment frame (3) is installed on the one-dimensional guide rail platform (5); firstly, adjust the CGH (4) and The distance between the tested parts (6) is such that the distance between the CGH (4) and the axis of the measured cylindrical workpiece is the back focal length of the CGH (4); secondly, adjust the six-dimensional adjustment frame (3) so that the interferometer (1) The outgoing optical axis passes through the center of the CGH (4) and deflects it by 1 degree relative to the optical axis. By adjusting the position of the marking point of the CGH (4), the focal line of the cylindrical ...

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Abstract

The invention relates to a cylindricity error interference measuring device and an adjusting method thereof. The device comprises an interferometer, a support, a six-dimensional adjusting rack, a CGH, a one-dimensional guiding rail platform, a measured piece, a four-dimensional adjusting mechanism, a five-dimensional adjusting mechanism and an electric control lifting platform. The interferometer and the one-dimensional guiding rail platform are installed on the support. The six-dimensional adjusting rack is installed on the one-dimensional guiding rail platform. The CGH is installed on the six-dimensional adjusting rack, so that the light-emitting axis of the interferometer passes through the CGH, and the distance between the CGH and the measured piece is adjusted. A measured piece adjusting mechanism is composed of the four-dimensional adjusting mechanism, the five-dimensional adjusting mechanism and the electric control lifting platform. The electric control lifting platform is arranged at the lower end of the measured piece adjusting mechanism. The axis line of the measured piece coincides with the axis line of a rotating platform on a five-dimensional adjusting platform by adjusting a four-dimensional adjusting platform, then the axis line of the rotating platform accurately coincides with the cylindrical focal line generated by the CGH by adjusting the five-dimensional adjusting platform, and complete cycle detection of the face type of the cylindrical measured piece is achieved through the rotating platform in cooperation with the lifting platform.

Description

technical field [0001] The invention relates to a cylindricity error detection device and method, in particular to a cylindrical surface interference splicing measurement device and its adjustment method, which effectively solves the problem of difficult installation and adjustment of the measured cylindrical workpiece, and realizes its overall accuracy. Weekly testing. Background technique [0002] With the development of scientific and technological level and industrial level, the requirements for cylindrical parts in modern industrial production are getting higher and higher. In the inspection of cylindrical parts, the measurement of cylindricity error is one of the important accuracy indicators for inspecting such parts. Although the splicing interferometry device and method for cylindricity error can meet the ISO sampling requirements and achieve high-precision measurement, the installation and adjustment of the measured part is difficult, which hinders the development...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 于瀛洁许海峰彭军政葛东宝宋琨鹏
Owner SHANGHAI UNIV
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