Silicon wafer eccentric tester

Abstract

A silicon wafer eccentric tester comprises a dial indicator, a bearing piece, a supporting seat, a testing head and a tester body. The bearing piece is arranged on the supporting seat, the tester body is arranged on one side of the bearing piece, the dial indicator is fixedly arranged on the tester body, the testing head is arranged at the bottom end of the dial indicator and perpendicularly points to the center of the bearing piece, the bearing piece is in a three-foot type and comprises a fixing plate, a support A, a support B and a support C, the fixing plate is in a hollowed type, and the support A, the support B and the support C are all arranged at the hollowed position. The silicon wafer eccentric tester is adopted to measure the eccentricity of a silicon wafer, the eccentricity of the silicon wafer can be obtained easily without adopting expensive equipment imported from abroad, the equipment is simple, the price is low, the measurement method is convenient, maintenance is easy, and the device is suitable for being used for a large number of common enterprises for producing optical devices.

Description

technical field

[0001] The invention relates to the technical field of optical element processing, in particular to a silicon wafer eccentricity tester for measuring the eccentricity of a silicon wafer. Background technique

[0002] In recent years, with the progress and development of science and technology, in various optical systems used in digital cameras, video cameras, etc., silicon wafers are often used to improve optical performance and miniaturize the optical system. Along with this, a method of measuring the amount of eccentricity of a silicon wafer is required.

[0003] Traditional eccentricity measuring instruments measure the eccentricity of such optical components by refracting light emitted by light sources through transparent optical components. However, silicon wafers, as an opaque solid, cannot be measured by this method. Moreover, most of the mechanical equipment used in this traditional measurement of the eccentricity of the optical element is imported f...

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