Molecular pump pumping speed tester
A molecular pump and tester technology, applied in pump control, non-variable pumps, machines/engines, etc., can solve the problems of low test accuracy, cumbersome operation, complicated operation, etc., and achieve improved test efficiency, accurate measurement results, The effect of high test accuracy
Inactive Publication Date: 2016-11-30
山东亿家能太阳能有限公司
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Problems solved by technology
However, when using this method to measure the pumping speed, it is necessary to replace the droppers of different specifications at different air pressure measurement points, which is cumbersome and time-consuming; when measuring low air pressure, the required dropper capacity is small, and the height of the oil column rises and The time measurement error is large, which leads to a large error in the pumping speed measurement; and the dropper method has strict requirements on the measurement environment. The national standard stipulates that the ambient temperature must be controlled within the range of 15-25±1°C; , will be affected by the air pressure of the measurement environment
Therefore, the current molecular pump pumping speed measuring instrument has low test accuracy, complicated operation, low test efficiency, and cannot realize automatic continuous measurement, and does not have the function of automatic data collection and processing
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[0022] In order to further explain the technical means and effects that the present invention adopts to achieve the intended invention purpose, the specific implementation and structure of the molecular pump pumping speed tester and electronic equipment proposed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. , features and their effects are described in detail below. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
[0023] like figure 1 As shown, a kind of molecular pump pumping speed tester that one embodiment of the present invention proposes, comprises test cover 1 and controller 7, is connected with gas bottle 9 on described test cover 1, and described gas bottle 9 is to described ...
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The invention discloses a molecular pump pumping speed tester, which comprises a test cover and a controller. A gas bottle is connected to the test cover, and the gas bottle provides test gas into the test cover. A flow control unit is arranged between the test cover and the test cover to control and detect the flow of the test gas flowing from the gas cylinder into the test cover, the flow control unit is controlled by the controller, and the test cover is also Connected with a vacuum gauge, the vacuum gauge is used to monitor the pressure data in the test cover, the pressure monitored by the vacuum gauge and the flow rate monitored by the flow control unit are respectively transmitted to the controller, and the controller according to The pressure data and flow data calculate the pumping speed. The invention has the advantages of high testing precision, good repeatability, easy operation and the like; the testing efficiency is greatly improved.
Description
technical field [0001] The invention relates to the field of vacuum technology, in particular to a molecular pump pumping speed tester. Background technique [0002] Molecular pumps are widely used in the vacuum industry as a kind of vacuum obtaining equipment, and the pumping speed of molecular pumps is one of the important indicators to measure the performance of molecular pumps. When the molecular pump is equipped with a standard test cover and works under the specified conditions, the ratio of the gas flow flowing through the test cover to the equilibrium pressure measured at the designated position on the test cover is referred to as the pumping speed of the pump. [0003] At present, the pumping speed of the molecular pump is tested according to the national standard GB7774-87 "Turbomolecular Pump Performance Test Method". Using the constant pressure method, when the air pressure at the pump port of the molecular pump is balanced, record the gas flow value charged int...
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IPC IPC(8): F04D27/00
Inventor 郭帅周旭苗建朋池华敬孟秀清陈革章其初
Owner 山东亿家能太阳能有限公司