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Hemispherical resonant gyroscope with sheathed electrodes

A technology of hemispherical resonant gyroscope and hemispherical resonance, which is applied in the direction of gyroscope effect for speed measurement, gyroscope/steering sensing equipment, measuring device, etc., to achieve high impact resistance, facilitate mass production, and facilitate processing

Active Publication Date: 2017-03-15
SHANGHAI JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the defects in the prior art, the object of the present invention is to provide a hemispherical resonant gyroscope with outer jacket electrodes. The gyroscope has the characteristics of simple structure, convenient processing, impact resistance, good vacuum packaging, etc., and solves the need of hemispherical resonant gyroscope. Problems with custom-made external electrodes, making external electrodes as general-purpose equipment

Method used

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  • Hemispherical resonant gyroscope with sheathed electrodes
  • Hemispherical resonant gyroscope with sheathed electrodes
  • Hemispherical resonant gyroscope with sheathed electrodes

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Embodiment Construction

[0028] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0029] Such as figure 1 As shown, the present embodiment provides a hemispherical resonant gyro with jacket electrodes, including:

[0030] A cube matrix 1;

[0031] A hemispherical resonator 2;

[0032] eight internal electrodes 3;

[0033] a cavity 4 in the cube matrix;

[0034] A jacket electrode base 5;

[0035] Eight jacket electrodes 6;

[0036] a cavity 7 located in the body of the jacket electrode;

[0037] Wherein: the positions of the eight inner electrodes 3 of the hemispherical ...

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Abstract

The invention provides a semispherical resonator gyroscope with jacket electrodes. The semispherical resonator gyroscope comprises one cube base body, one semispherical resonator body, eight internal electrodes, one cavity in the cube base body, one jacket electrode base body, eight jacket electrodes and one cavity in the jacket electrode base body, wherein the eight internal electrodes of the semispherical resonator body correspond to the eight jacket electrodes one to one, the semispherical resonator body is positioned in the jacket electrode base body, and the cube base body is connected with the jacket electrode base body by bonding. The semispherical resonator gyroscope has the characteristics of being high in reliability and conductive to vacuum encapsulation, and the like, and the technology is simple.

Description

technical field [0001] The present invention relates to a hemispherical resonant gyroscope in the field of micro-electromechanical technology, in particular, to a hemispherical resonant gyroscope with outer jacket electrodes. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliab...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 张卫平汪濙海唐健刘亚东成宇翔孙殿竣陈文元
Owner SHANGHAI JIAOTONG UNIV
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