A large-scale semiconductor equipment intensive assembly cabinet
A semiconductor and equipment technology, applied in the field of intensive assembly cabinets for large-scale semiconductor equipment, can solve the problems of multiple control boxes, multiple interconnection cables, and separation of functional areas, and achieve the effect of reducing space constraints
Active Publication Date: 2017-05-31
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
[0004] The present invention provides an intensive assembly cabinet for large-scale semiconductor equipment to solve the phenomenon of separation of functional areas caused by cumbersome power supply equipment involved in large-scale control systems, many control boxes, many interconnecting cables, and many maintenance and operation surfaces.
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[0027] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the drawings of the present invention all adopt simplified forms and all use imprecise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.
[0028] The large-scale semiconductor equipment intensive assembly cabinet provided by the present invention, such as Figure 1 to Figure 5 As shown, it includes a cabinet frame 100, an outer shell 200 covering the periphery of the cabinet frame 100, and an internal frame 300 arranged inside the cabinet frame 100. The internal frame 300 divides the cabinet frame 100 into an upper side The first heat dissipation channel 400, and the power supply part 500 and the control chass...
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The invention relates to an intensive assembling cabinet for large semiconductor equipment. The intensive assembling cabinet comprises a cabinet frame, an outer shell which is wrapped on the periphery of the cabinet frame, and an internal frame arranged in the cabinet frame. The internal frame divides the cabinet frame into a first radiating channel placed on the upper side, a power supply part and a control cabinet, wherein the power supply part and the control cabinet are placed on the lower side and are distributed left and right. The power supply part is connected with the control cabinet through a cable, the power supply part is placed in a stacking mode, and a maintenance space is reserved between the power supply part and the control cabinet. The control cabinet is in a self-rotating mode. According to the intensive assembling cabinet for the large semiconductor equipment, the front face and the back face of the power supply part are maintained through organization layout and the reserved maintenance space, and the rotating function of the control cabinet in the self-rotating mode is used for maintaining the front face and the back face of the control cabinet. The first radiating channel is used for pumping and draining the heat of the power supply part and the control cabinet. Meanwhile, space units for radiating, maintaining and cable placing are merged, and therefore intensive assembling is achieved.
Description
Technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a large-scale semiconductor equipment intensive assembly cabinet. Background technique [0002] At present, equipment in the semiconductor industry mostly relies on complex and large-scale control systems to operate. As a result, equipment needs to provide a lot of space for control cabinets, power supply cabinets, interconnect cables, and maintenance areas, which increases the overall equipment to a certain extent. size of. [0003] Some designs of the existing equipment have considered the above problems. The separately designed electrical cabinet in the equipment installs the sub-system chassis in a centralized area, and the electrical cabinet is placed in a place where the whole equipment can be easily pushed out, which solves a certain installation space. The problem of waste, but the size of the space required by the push-pull range basically requires maintenance personnel ...
Claims
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IPC IPC(8): H05K5/00H05K7/02H05K7/14H05K7/20
Inventor 鞠建刚潘菊凤
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD