A double-layer two-phase reactive linear precision adjustment slide table
A precision adjustment and response technology, which is applied in the field of double-layer two-phase reaction linear precision adjustment slide table, achieves the effect of compact shape, simple control method and improved space utilization rate
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[0016] Below in conjunction with accompanying drawing and embodiment the present invention is further described:
[0017] A double-layer dual-phase reactive linear precision adjustment slide table, including: a reverse-phase fixed plate 1, a linear slide rail 2, a normal-phase fixed plate 3 and a moving plate 4; the reverse-phase fixed plate 1 and the normal-phase fixed plate 3 are silicon steel sheets The tooth-shaped plate is made, and is wound by several coils respectively, and the coils include: A-phase coil and B-phase coil, and the corresponding N pole and S pole of the same-phase coil on the anti-phase fixed plate 1 and the normal-phase fixed plate 3 The polarity is opposite, the teeth of the in-phase coils are aligned, and the distance between any coil and its adjacent coil is 3 / 2 tooth pitch and 1 / 2 tooth pitch (the tooth pitch is represented by "d" in the drawings); The moving plate 4 is arranged in the middle of the anti-phase fixed plate 1 and the positive-phase fi...
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