Method and device for three-dimensional measurement of free-form surface topography
A three-dimensional measurement and curved surface technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of low utilization rate of zero-order spectrum energy, frequency filling, etc., achieve convenient image field correction, reduce wave aberration, and high contrast. Effect
Active Publication Date: 2016-03-09
FLIGHT AUTOMATIC CONTROL RES INST
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[0004] The purpose of the present invention is to provide an on-line non-contact grating for the production problems of controlling the rectangular grating, frequency filling, low energy utilization rate of the zero-order spectrum, general lens selection, and limited measurement field of view in the prior art. Freeform Surface Profile Measuring Device
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[0020] In the following, the present invention will be further described in conjunction with the embodiments:
[0021] See also figure 1 with figure 2 The free-form surface shape three-dimensional measurement device of the present invention includes a laser 1, a beam shaping system 2, a rectangular grating 3, a monochromatic Fourier transform lens 4, a spectrum selector 5, a wave plate 6, a monochromatic variable magnification lens 7, and a precision screw 81. Precision rail one 82, total reflection mirror one 91, total reflection mirror two 92, precision screw two 83, precision rail two 84, free-form surface to be tested 10, high-speed high-definition camera 11, computer and software processing system 12, machine tool platform The main shaft 13, the gantry cantilever beam 14.
[0022] Among them, the beam shaping system is located behind the laser to expand, collimate, and shape the laser beam; the rectangular grating is located behind the beam shaping system, and the rectangula...
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The invention belongs to free-form surface morphology measurement technologies and particularly relates to a free-form surface morphology three-dimensional measurement method and device. The free-form surface morphology three-dimensional measurement device comprises a laser, a beam shaping system, a rectangular raster, a monochromatic Fourier transform lens, a wave plate and spectrum selector, a monochrome convertible lens, two holophotes, a free-form surface to be detected, a high-speed and high-definition camera, two precision lead screw sets, two precision guide rail sets, a machine tool platform main shaft and a gantry suspension beam. According to the method and device, sinusoidal intensity targets are generated by the utilization of a space optics Fourier analysis method for outputting and are projected on the free-form surface to be detected, and the three-dimensional morphology measurement is carried out; dynamic online measurement of three-dimensional surfaces of various free-form surfaces including spheres, ellipsoids, hyperboloids and paraboloids is convenient; milling, fine grinding, rough polishing and elaborate polishing of optical surfaces are convenient; secondary clamping is not needed during dynamic online detection of all technological processes.
Description
Technical field [0001] The invention belongs to a free-form surface shape measurement technology, and specifically relates to a free-form surface shape measurement method and device. Background technique [0002] The measurement methods of various free-form surfaces, including spherical, ellipsoidal, hyperboloid, and paraboloid, are generally measured with a three-dimensional profiler; the detection of optical surfaces in the milling, fine grinding and rough polishing stages affects the shape of aspherical surfaces. The key stage of convergence accuracy and speed. At this time, the surface shape error has not reached the order of the light wavelength, and the surface roughness is not good. The usual interference detection method has certain difficulties. Therefore, a contact three-dimensional profiler is also used. However, in the fine polishing stage, an interferometer is generally used. In some cases, it is still necessary to rely on special equipment to process special auxil...
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IPC IPC(8): G01B11/24
Inventor 任旭升李县洛腾霖陈勇
Owner FLIGHT AUTOMATIC CONTROL RES INST