Method and system for predicating pull-in voltage of electrostatic drive stepped micro-cantilever beam

Abstract

The invention provides a method and system for predicating the pull-in voltage of an electrostatic drive stepped micro-cantilever beam The method comprises the steps of establishing a gap model of the stepped micro-cantilever beam and a substrate fixed electrode; establishing a trial function model of deformation of the stepped micro-cantilever beam under the action of electrostatic force; carrying out region partitioning on the stepped micro-cantilever beam according to the size of the cross section of the stepped micro-cantilever beam to obtain a plurality of beam units, and determining the weighted rigidity of the stepped micro-cantilever beam according to structure parameters of the beam units and material parameters of the stepped micro-cantilever beam, wherein the material parameters comprise material characteristic length parameters; calculating the pull-in position coefficient of the stepped micro-cantilever beam according to the gap model and the trail function model; determining the plug-in voltage of the stepped micro-cantilever beam according to the pull-in position coefficient and the weighted rigidity. By means of the method and system, the accuracy of a predication result can be improved, the calculation amount can be decreased, and the influence of the scale effect can be reflected.

Description

technical field [0001] The invention relates to the field of micro-electromechanical technology, in particular to a method and system for predicting the pull-in voltage of an electrostatically driven stepped micro-cantilever beam. Background technique [0002] The stepped micro-cantilever beam is a common structure in an electrostatically driven micro-electromechanical system (MEMS), and is widely used in radio frequency micro-switches, micro-sensors, micro-actuators, etc. Pull in voltage (pull in voltage), also known as pull down voltage or actuation voltage, is an important technical parameter for electrostatic drive MEMS product performance improvement and new product development, which determines the performance of MEMS products, Reliability and scope of application. A bias voltage is applied between the stepped micro-cantilever beam and the substrate to generate an electrostatic force between the stepped micro-cantilever beam and the substrate. Under the action of the ...

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Problems solved by technology

[0005] A large number of studies have shown that when the thickness of the micro-cantilever beam is close to the characteristic length parameter of the material, the prediction results ignoring the s

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