An Active Adjustment Device for Grating Knife with Abbe Error Correction Function

A grating knife, active adjustment technology, applied in the directions of diffraction grating, optics, optical components, etc., to reduce positioning errors, improve grating scoring quality and performance indicators, and reduce positioning errors.

Active Publication Date: 2017-06-23
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to overcome the defects of existing grating cutters and provide an active adjustment device for grating cutters with Abbe error correction function

Method used

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  • An Active Adjustment Device for Grating Knife with Abbe Error Correction Function
  • An Active Adjustment Device for Grating Knife with Abbe Error Correction Function
  • An Active Adjustment Device for Grating Knife with Abbe Error Correction Function

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0030] In the description of the present invention, the terms "inner", "outer", "longitudinal", "transverse", "upper", "lower",

[0031] The orientations or positional relationships indicated by "top", "bottom", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and do not require that the present invention must be constructed and operated in a specific orientation, so it cannot be understood To limit the present invention.

[0032] Such as figure 1 and figure 2 As shown, the pre...

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Abstract

The invention relates to the technical field of grating scribing, and specifically discloses an active adjustment device for a grating cutter with an Abbe error correction function. The invention includes a tool holder lifting mechanism, a tool holder support frame, a micro-positioning workbench, a workbench mounting seat, a flexible hinge, piezoelectric ceramics, an extension spring, a small knife holder, and a diamond carving knife; Contact and four symmetrical flexible hinges make the micro-positioning table have greater rigidity in directions other than the z-axis; the micro-positioning table performs micro-positioning movement along the z-axis under the action of piezoelectric ceramic stretching motion, making The displacement deviation between the actual position of the diamond burr and the ideal position is the smallest. The present invention uses a biaxial interferometer to measure the position of the diamond cutter in real time, avoiding the influence of the Abbe measurement error caused by the single-axis interferometer on the positioning accuracy of the diamond cutter, helping to reduce the positioning error of the diamond cutter, and improving Raster rule quality and performance metrics.

Description

technical field [0001] The invention relates to the technical field of grating scribing, in particular to an active adjustment device for a grating cutter with an Abbe error correction function. Background technique [0002] The grating mechanical scribing method mainly relies on a diamond knife to extrude a series of evenly spaced grooves on the surface of the aluminum film. Therefore, the structural stability and operating accuracy of the tool holder system equipped with the diamond knife are high. [0003] The existing active tool adjustment device for the scribing tool holder uses a laser interferometer to measure the relative displacement between the grating scribing tool holder and the workbench carrying the grating substrate, and uses a piezoelectric actuator to measure the relative displacement between the grating scribing tool holder and the workbench carrying the grating substrate. The position of the knife is adjusted in real time, so that the deviation between th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
CPCG02B5/1852
Inventor 李晓天于海利唐玉国刘兆武杨超齐向东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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