Laser-assisted glow discharge ionization device

Abstract

The invention discloses a laser-assisted glow discharge ionization device which comprises a laser light source, a mass spectrometer, a closed ionization cavity and an ionization body. The ionization body comprises a copper column fixing base which contains a hollow copper column and a sample fixing base which contains a sample, the hollow copper column is connected to the ground potential through a wire and an ionization cavity bottom plate, and the sample is connected with a glow discharging power supply. The copper column fixing base and the sample fixing base are arranged oppositely, a laser hole is formed in the side, opposite to the sample, of the hollow copper column, and an ionization area is formed in the laser hole. Lasers emitted from the laser light source penetrate through the hollow copper column and then vertically radiate to the sample. A repeller plate which is used for feeding ions in the ionization area into the mass spectrometer is arranged on one side of the ionization area, and the repeller plate is connected with a DC high-voltage power supply. According to the laser-assisted glow discharge ionization device, glow discharge voltage signals and the ground potential are introduced through the structure, DC high voltages are introduced through the repeller plate to introduce ions generated by discharging into the mass spectrometer, the ion transmission efficiency is improved, and the detecting sensitivity is high.

Description

technical field [0001] The invention is used in the field of mass spectrometry analysis and detection, and in particular relates to a laser-assisted glow discharge ionization device. Background technique [0002] As an important optoelectronic material, high-purity materials are widely used in aerospace, microelectronics, information, infrared, solar energy and other industrial fields. For example: high-purity copper can be directly used as an additive element in the development of superalloys in aviation and space atom industries, and in the analysis of standard samples. It is the main material for preparing high-quality audio cables, liquid crystal display sputtering targets, and ion coatings. High-purity titanium is an important material for manufacturing aircraft, rockets, spacecraft, ships, telecommunications equipment and artificial bones. 6N (99.9999%) grade silicon is the main material for manufacturing solar cells, while the purity of semiconductor-grade polysilico...

AI Technical Summary

Problems solved by technology

For the detection of semiconductor and non-conductive materials, DC glow discharge ionization needs to introduce a conductive matrix, and the detection accuracy is not high

At present, the uniformity of ionization of different elements in the commonly used glow discharge form is not high, and consistent ionization cannot be achieved, and the matrix effect is more obvious.

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