Device and method for detecting substrate
A substrate inspection and substrate technology, applied in the field of inspection, can solve problems such as waste of production costs, affecting product quality, etc., and achieve the effect of reducing waste
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[0035] In order to accurately and quickly detect whether there is a defect in the substrate, thereby effectively controlling product quality and reducing waste of production costs, embodiments of the present invention provide a substrate detection device and method. In the technical solution of the embodiment of the substrate detection device, the line source light emitting device emits incident light to the substrate at a set incident angle, and the incident light can scan the surface of the substrate with the relative movement between the line light source light emitting device and the substrate; the reflected light receiving device is It is set to receive the reflected light corresponding to the incident light directed at the standard plane of the substrate, and can send out a defect alarm signal of the substrate when the actual receiving area of the reflected light is inconsistent with the standard receiving area. When there are defects such as incomplete or cracked subst...
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