Device and method for detecting substrate

A substrate inspection and substrate technology, applied in the field of inspection, can solve problems such as waste of production costs, affecting product quality, etc., and achieve the effect of reducing waste

Inactive Publication Date: 2015-04-29
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If a defective or cracked substrate is used for production, it will inevitably af

Method used

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  • Device and method for detecting substrate
  • Device and method for detecting substrate
  • Device and method for detecting substrate

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[0035] In order to accurately and quickly detect whether the substrate has defects, thereby effectively controlling product quality and reducing waste of production costs, embodiments of the present invention provide a substrate detection device and method. In the technical solution of the substrate inspection device embodiment, the line light source light emitting device emits incident light to the substrate at a set incident angle, and the incident light can scan the surface of the substrate along with the relative movement of the line light source light emitting device and the substrate; the reflected light receiving device is It is set to receive the reflected light corresponding to the incident light directed to the standard plane of the substrate, and when the actual receiving section of the reflected light is inconsistent with the standard receiving section, an alarm signal for the presence of a substrate defect can be issued. When the substrate has defects such as defect...

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Abstract

The invention discloses a device and a method for detecting a substrate. Whether defects exist on the substrate can be accurately and rapidly detected, so that the quality of the product can be effectively managed and controlled and the waste of the production cost is reduced. The device for detecting the substrate comprises a line source light-emitting device and a reflected light receiving device, wherein the line source light-emitting device sends out an incident light to the substrate at a set incident angle; the incident light scans the surface of the substrate along with relative movement of the line source light-emitting device and the substrate; and the reflected light receiving device is used for receiving the reflected light corresponding to the incident light which emits towards a standard plane of the substrate, and sending out a substrate defect alarm signal when an actual receiving zone of the reflected light is inconsistent with a standard receiving zone.

Description

technical field [0001] The invention relates to the technical field of detection, in particular to a substrate detection device and method. Background technique [0002] At present, during the production of flat panel display devices, many sealed and continuous production equipment are not equipped with a substrate inspection link. If a defective or cracked substrate is used for production, it will inevitably affect the quality of the product and cause waste of production costs. Contents of the invention [0003] The purpose of the embodiments of the present invention is to provide a substrate inspection device and method to accurately and quickly detect whether there is a defect in the substrate, thereby effectively controlling product quality and reducing waste of production costs. [0004] An embodiment of the present invention provides a substrate detection device, including a line light source light emitting device and a reflected light receiving device, wherein: ...

Claims

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Application Information

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IPC IPC(8): G01N21/88
Inventor 李发顺崔富毅白雪飞阮士薪
Owner BOE TECH GRP CO LTD
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