Vacuum drying device and vacuum drying method

Abstract

The invention discloses a vacuum drying device and a vacuum drying method and relates to the technical field of drying. According to the vacuum drying device and the vacuum drying method, the phenomenon of non-uniform drying speed at different positions of materials in the vacuum drying process can be improved. The vacuum drying device provided by the embodiment of the invention comprises a chamber, wherein a base station is arranged in the chamber, a flow guide cover is also arranged in the chamber and comprises a side wall, an upper end opening and a lower end opening; in the vacuum drying process, the lower end opening is fit with the base station, a gap is formed between the upper end opening and the top of the chamber, and materials are positioned in the flow guide cover. The embodiment of the invention also provides the vacuum drying method.

Description

technical field [0001] The invention relates to the field of drying technology, in particular to a vacuum drying device and a vacuum drying method. Background technique [0002] An organic light emitting diode display device includes a plurality of film layers sequentially arranged on a substrate, and each film layer can be formed by various methods such as evaporation and inkjet printing. Among them, inkjet printing has the advantages of high material utilization rate and large-size printing, and has become an important way to realize mass production of large-size OLED display devices. [0003] Usually, after the inkjet printing is completed, the substrate needs to be moved to a vacuum drying device for drying, so that the solvent in the ink droplets can be volatilized to finally form a film layer. Existing vacuum drying equipment such as figure 1 As shown, the vacuum drying device includes a chamber 1', a base 2' and two suction ports 3' symmetrically arranged at the bot...

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Problems solved by technology

[0004] The inventors found that during the drying process, the airflow in the chamber 1' flows from the base 2' to the suction port 3', and the closer to the suction port 3', the greater the airflow velocity, resulting in the airflow velocity in the peripheral area of ​​the substrate 4' Greater than the air velocity of the central area of ​​the substrate 4', so that the drying speed of the ink droplets in the peripheral area of ​​the substrate 4' is greater than the drying speed of the ink droplets in the central area of ​​the substrate 4', after the ink droplets in the peripheral area of ​​the substrate 4' are dried , the ink droplets in the central area of ​​the substrate 4' are still in a liquid state, thereby flowing toward the peripheral area of ​​the substrate 4', eventually causing the thickness of the film layer in the peripheral area of ​​the substrate 4' to be greater than the thickness of the film layer in the central area of ​​the substrate 4', Affects the display effect of organic light-emitting diode display devices

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