A multi-chip three-dimensional hybrid packaging structure and its preparation method
A three-dimensional hybrid, packaging structure technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, semiconductor devices, etc., can solve the problems of package warpage reliability, chip thermal expansion coefficient mismatch, and deficiencies.
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[0029] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0030] A multi-chip three-dimensional hybrid package structure, mainly composed of lower chip 3, chip bump 4, lower plastic package 5, circuit layer 6, adhesive 7, upper chip 8, bonding wire 9, upper plastic package 10 and electrodes 12 The lower plastic package 5 encapsulates the lower chip 3, the lower chip 3 faces upwards, and the chip bumps 4 of the lower chip 3 expose the surface of the lower plastic package 5; the lower plastic package 5 is wired on the surface to form a circuit layer 6, The wiring area of the circuit layer 6 is pasted with the upper layer chip 8 through the adhesive 7, and the bonding wire 9 connects the upper layer chip 8 and the circuit layer 6, and the upper layer plastic package 10 encapsulates the upper layer chip 8, the circuit layer 6 and the bonding wire 9; The body 5 has a through hole 11, the upper part of the through hole 11 is th...
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