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Biosensor based on ssoi MOSFET and preparation method thereof

A biosensor and sensing technology, applied in the field of biosensor devices and their preparation, can solve problems such as instability of biocured films, and achieve the effects of increased mobility, highly sensitive detection, and reduced sub-threshold slope.

Active Publication Date: 2017-09-01
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage is that the biocured film is unstable

Method used

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  • Biosensor based on ssoi MOSFET and preparation method thereof
  • Biosensor based on ssoi MOSFET and preparation method thereof
  • Biosensor based on ssoi MOSFET and preparation method thereof

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Embodiment Construction

[0048] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0049] see Figure 1 to Figure 9. It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbit...

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Abstract

The invention provides a biosensor based on sSOI MOSFET and a preparation method of the biosensor. The preparation method comprises the following steps: 1) providing an sSOI substrate, wherein the thickness of top strain silicon of the sSOI substrate is 10nm-50nm; 2) manufacturing a device region; 3) forming an N+ source region, an N+ drain region and a strain channel region; 4) forming a dielectric layer on the surface of the sSOI substrate; 5) forming a metal contact opening hole and manufacturing a metal contact electrode; 6) manufacturing an electrode protective layer and exposing a grid sensing region; 7) manufacturing a back grid on the back of the body silicon substrate; and 8) performing surface activation modification on the surface of the grid sensing region. Through the adoption of the preparation method, the strain silicon is used as the channel, and a high signal to noise ratio is obtained since the migration rate of the channel material is increased through the strain technology; the channel is in a full exhaustion state along with the thinning of the channel material, the subthreshold slope of the corresponding device is reduced, and the high sensitivity is obtained; therefore, the biosensor provided by the invention can be used for detecting biomolecules with high sensitivity.

Description

technical field [0001] The invention relates to a biosensor and its preparation method, in particular to a sSOI MOSFET-based biosensor and its preparation method. Background technique [0002] A biosensor is an instrument that is sensitive to biological substances and converts its concentration into an electrical signal for detection. It is made of immobilized biosensitive materials as recognition elements (including enzymes, antibodies, antigens, microorganisms, cells, tissues, nucleic acids and other biologically active substances) and appropriate physical and chemical transducers (such as oxygen electrodes, photosensitive tubes, field effect tubes, Piezoelectric crystals, etc.) and an analysis tool or system composed of a signal amplification device. Biosensors have the functions of receptors and converters. An instrument that is sensitive to biological substances and converts their concentrations into electrical signals for detection. Various biosensors have the follo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/414
Inventor 文娇俞文杰刘畅赵清太王曦
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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