A Piezoelectric Electromagnetic Integrated Power Generation Device Based on Micromachining Technology
A power generation device and piezoelectric technology, which is applied in the field of micro-electromechanical systems, can solve the problems of MEMS devices without reliable vacuum packaging technology, etc., and achieve the effects of long working life, large current, and improved energy output
Active Publication Date: 2017-02-01
SHANDONG UNIV OF SCI & TECH
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Problems solved by technology
Vacuum packaging technology is a technical problem that has not been overcome for many years. Many innovative MEMS devices with potential market applications can only stay in the laboratory for functional demonstrations due to lack of reliable vacuum packaging technology.
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[0053] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the present invention is not limited to these embodiments.
[0054] Such as figure 1 and figure 2 As shown, a piezoelectric electromagnetic integrated power generation device based on micromachining technology includes a substrate 21, a casing 2 and a cover plate 1 are arranged above the substrate 21, the upper and lower parts of the casing 2 are open structures, and the casing 2 The bottom end is bonded to the upper end surface of the substrate 21 through a eutectic bonding process. Between the top end of the housing 2 and the lower end surface of the cover plate 1, a soldering piece 3 and a metal ring piece 20 bonded to each other are arranged. The welding piece 3 The top of the metal ring 20 is bonded to the lower end of the cover plate 1, and the bottom of the metal ring 20 is bonded to the top of the shell 2. The shell 2 is m...
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The invention discloses a piezoelectric electromagnetic integrated power generation device based on micromachining technology, which includes a substrate, a casing and a cover plate are arranged above the substrate, the upper and lower parts of the casing are both open structures, and the bottom of the casing is connected to the substrate. The upper end surface of the cover plate is bonded, the top end of the shell and the lower end surface of the cover plate are provided with a solder piece and a metal ring piece bonded to each other, the top end of the solder piece is bonded to the lower end surface of the cover plate, and the bottom end of the metal ring piece is connected to the The top of the shell is bonded together, and the cover plate, soldering piece, metal ring piece, shell and substrate cooperate to form a vacuum chamber, a frame is arranged in the vacuum chamber, a substrate is arranged on the frame, and a piezoelectric device is arranged on the substrate. Generators and electromagnetic generators. The invention realizes the compound power generation of piezoelectricity and electromagnetic, can convert the vibration energy in the environment into electric energy, the output voltage is high, the current is large, the energy density is high, and the energy conversion rate is high, and it can provide durable, stable, efficient energy.
Description
technical field [0001] The invention belongs to the field of micro-electromechanical technology, in particular to a piezoelectric-electromagnetic integrated power generation device based on micro-machining technology. Background technique [0002] MEMS refers to a small device with a size below a few centimeters. It is an independent intelligent system, mainly composed of sensors, actuators and micro energy sources. Due to the characteristics of low cost, small size, light weight, high reliability, ability to realize complex functions, batch production, and integration, micro-electromechanical systems make them widely used in modern industry, agriculture, transportation, biology, medicine, aviation, aerospace and The field of daily life and home appliances has more and more broad application prospects. [0003] Common technologies such as the design, manufacture, integration, packaging, and reliability testing of MEMS have promoted its development. Electromechanical system...
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IPC IPC(8): H02N2/18H02K35/02
Inventor 杜小振张龙波曾祥伟朱文斗张燕
Owner SHANDONG UNIV OF SCI & TECH