A waveguide structure

Abstract

The invention discloses a waveguide structure, which comprises a silica substrate layer, a silicon nitride lower strip layer, a polyurethane acrylate slit layer, and a silicon nitride upper strip layer, wherein the lower strip layer, the slit layer and the upper strip layer have the same width; both the lower strip layer and the upper strip layer adopt a positive thermo-optical coefficient material; and the slit layer adopts a negative thermo-optical coefficient material. Through setting the material and the size of each layer, and the purposes of realizing waveguide refractivity temperature drift self compensation and low flattened dispersion can be achieved.

Description

technical field [0001] The invention belongs to the field of waveguide optics and integrated optics, and in particular relates to a waveguide structure which simultaneously realizes temperature self-compensation and low flat dispersion, which is applied to a silicon-based waveguide microcavity ultra-broadband optical frequency comb. Background technique [0002] The use of wavelength division multiplexing technology in on-chip optical interconnection is the key to the fact that optical interconnection can truly surpass electrical interconnection in terms of energy consumption and transmission capacity. The light source device is the core bottleneck problem to be solved urgently to realize the on-chip interconnection of wavelength division multiplexing. The silicon-based microcavity optical frequency comb can be used as the light source to generate multiple outputs with fixed spacing and stable wavelength. The generation of microcavity optical frequency comb requires low anom...

AI Technical Summary

Problems solved by technology

The generation of microcavity optical frequency comb requires low anomalous dispersion and flat dispersion waveguide structure, and the change of refractive index caused by thermo-optic effect will cause the resonant frequency of the cavity to drift, affecting the generation of optical frequency comb

It is difficult for the traditional waveguide to take into account the characteristics of low dispersion and flat dispersion, especially the temperature self-compensation cannot be realized under the premise of ensuring the dispersion characteristics. Therefore, a waveguide structure that realizes temperature self-compensation and low flat dispersion at the same time is needed

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