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Loop micro-cavity wave-guide filter for eliminating distributed mode coupling and its making method

A waveguide filter and annular microcavity technology, which is applied to waveguide devices, electrical components, circuits, etc., can solve the problems of short coupling length and low coupling efficiency.

Inactive Publication Date: 2009-05-13
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

In the ordinary annular microcavity waveguide filter, the coupling efficiency is very low due to the short coupling length between the annular ring and the input and output straight waveguide parts

Method used

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  • Loop micro-cavity wave-guide filter for eliminating distributed mode coupling and its making method
  • Loop micro-cavity wave-guide filter for eliminating distributed mode coupling and its making method
  • Loop micro-cavity wave-guide filter for eliminating distributed mode coupling and its making method

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Embodiment Construction

[0033] see figure 1 and figure 2 , the present invention provides a method for manufacturing an annular microcavity waveguide filter that eliminates distributed mode coupling, comprising the steps of:

[0034] (1) growing the lower waveguide cladding layer 22, the waveguide layer 33 and the upper waveguide cladding layer 44 sequentially on the substrate 11; wherein the refractive index of the waveguide layer 33 is higher than that of the upper waveguide cladding layer 44 and the lower waveguide cladding layer 22; Wherein the material of the waveguide layer 33 is a III-V group material or a Si-based material;

[0035] (2) Coating photoresist 55 on the surface of the cleaned upper waveguide cladding layer 44;

[0036] (3) transfer the required pattern to the photoresist 55 by ordinary photolithography or electron beam exposure and development technology, wherein the required pattern is the ring microcavity waveguide 333, and there are two ring microcavity waveguide 333 on bot...

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Abstract

The invention discloses a making method of ring-shaped micro-cavity waveguide filter to eliminate the distributed coupling, which comprises the following steps: (1) growing lower-wave conduct-bag layer, waveguide layer and upper-wave conduct-bag layer on the substrate sequently; (2) coating photoresist on the cleaned surface of upper-wave conduct-bag layer; (3) transmitting the needed pattern on the photoresist through ordinary photo-etching or electronic beam exposing and developing technique; (4) etching through chemical corrosion or dry method to obtain the entire element structure.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, in particular to an annular microcavity waveguide filter and a manufacturing method for eliminating distributed mode coupling. Background technique [0002] A microcavity filter is a device that utilizes the frequency selection function of a microcavity to selectively download signals in a channel. Due to the characteristics of small volume, narrow channel linewidth, large free spectral domain, and the use of cascaded cavity structure to achieve various filtering characteristics, the microcavity is a very promising wavelength splitting device in wavelength division multiplexing (WDM) systems (C. Manolatou, etc., Coupling of modes analysis of resonant channel add-drop filters, IEEE J. Quantum Electron. 35, p. 1322 (1999)). [0003] Filters based on distributed feedback require at least two resonant cavities to achieve full signal downloading since a single cavity supports only standing wav...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P11/00H01P1/207
Inventor 陈沁杨跃德黄永箴
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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