The invention relates to the field of glass
coating production equipment, in particular to a
spin coating device and method for glass
coating, which comprises a control base, a
machine cover is fixed above the control base, one side of the
machine cover is provided with a vacuumizing
pipe for vacuumizing the interior of the
machine cover and an
exhaust pipe for vacuumizing the interior of the machine cover, and the other side of the machine cover is provided with a
vacuum pump for vacuumizing the interior of the machine cover. Through cooperation of the IR
film coating mechanism, the AR
film coating mechanism and the lnk
spin coating mechanism, IR
film coating is conducted on a
wafer firstly, then AR face bottoming film
coating is conducted, the light
transmittance and
imaging quality of a final product are further optimized, IR film coating is conducted on the
wafer firstly, then AR face bottoming film coating is conducted, then lnk
spin coating is conducted, and finally AR film coating is conducted. The optical performance can be improved, the film coating
adhesive force can be enhanced, the technological process can be optimized, the product performance can be improved, the production efficiency can be improved, the cost can be reduced, the product reliability can be enhanced, and the probability of chromatic dispersion and high-temperature-resistant phenomena in the baking process can be reduced.