Semiconductor production line dynamic scheduling device

A dynamic scheduling, production line technology, applied in control/regulation systems, comprehensive factory control, instruments, etc., can solve problems such as the inability of production performance and real-time performance to meet requirements

Inactive Publication Date: 2015-11-11
TONGJI UNIV
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Problems solved by technology

[0007] The dynamic scheduling problem of the semiconductor production line adopts traditional optimal scheduling methods (operations research

Method used

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  • Semiconductor production line dynamic scheduling device
  • Semiconductor production line dynamic scheduling device
  • Semiconductor production line dynamic scheduling device

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Embodiment Construction

[0063] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is carried out on the premise of the technical solution of the present invention, and detailed implementation and specific operation process are given, but the protection scope of the present invention is not limited to the following embodiments.

[0064] Such as figure 1 As shown, this embodiment provides a dynamic scheduling device for a semiconductor production line, which is characterized in that it includes a sample generation module for generating data samples, a scheduling model offline learning module for establishing a scheduling model based on data samples, and a scheduling model for scheduling according to users. The objective and scheduling model generates a real-time scheduling strategy for the online scheduling module of the semiconductor production line.

[0065] 1) Generation of data samples

[0066] The sample...

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Abstract

The invention relates to a semiconductor production line dynamic scheduling device, comprising a sample generation module for generating data samples, a scheduling model off-line learning module for building a scheduling module according to the data sample, and a production online scheduling module used for generating a real-time scheduling strategy according to the user scheduling target and the scheduling model to perform online scheduling of the semiconductor production line. A matched scheduling model is chosen from a scheduling model database according to the user requirements; the system state information of the semiconductor production line is inputted; and the application scheduling model chooses an optimal or a close-to-optimal scheduling strategy from the candidate scheduling strategies to be applied to the operation of the production line. Compared with the prior art, the semiconductor production line dynamic scheduling device achieves the real-time performance and optimization of the scheduling, satisfies the effectiveness of the scheduling and improves the overall performance of the production line.

Description

technical field [0001] The invention relates to the field of automatic production scheduling, in particular to a dynamic scheduling device for a semiconductor production line. Background technique [0002] With the rapid development of information technology, the semiconductor manufacturing industry has become the pillar industry of the national economy and the mainstream of the global high-tech industry. The semiconductor production line scheduling problem is the core content of the production line management of semiconductor enterprises, and it is also the key to improving the core competitiveness of enterprises. Since the semiconductor production line is a dynamic system, there are various random and uncertain factors, such as machine failure, emergency production task insertion, etc. Therefore, the on-site management of the semiconductor production line needs to have the requirement of dynamic scheduling, that is, according to the real-time The production status quickly...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCG05B19/41865G05B19/41885Y02P90/02
Inventor 马玉敏乔非吴启迪陈曦吴文靖
Owner TONGJI UNIV
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