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Vertical Hall Effect Device

A Hall effect, vertical Hall technology, applied in Hall effect devices, devices using electro-magnetic effects, electro-solid devices, etc. Eliminate issues such as performance

Inactive Publication Date: 2018-02-06
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Vertical Hall effect devices of many different designs are known, but most of them are not suitable for the so-called spinning current method or spinning voltage method (or only achieve poor offset cancellation performance) and suffer from low magnetic sensitivity and large electric field

Method used

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  • Vertical Hall Effect Device
  • Vertical Hall Effect Device
  • Vertical Hall Effect Device

Examples

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no. 1 example

[0037] figure 1 A schematic cross-sectional view of a first embodiment of a vertical Hall effect device 1 is shown. According to a first embodiment, the vertical Hall effect device 1 comprises:

[0038] At least four Hall effect regions 2.1, 2.2, 2.3, 2.4, comprising a first Hall effect region 2.1, a second Hall effect region 2.2, a third Hall effect region 2.3 and a fourth Hall effect region at least partially decoupled from each other Area of ​​effect 2.4;

[0039] Wherein each of the at least four Hall effect regions has a first face 3 and a second face 4 opposite to the first face 3;

[0040] Wherein each of the at least four Hall effect regions 2.1, 2.2, 2.3, 2.4 has a first contact 2.1.1, 2.2.1, 2.3.1, 2.4.1 and a second contact on the first face 4 2.1.2, 2.2.2, 2.3.2, 2.4.2, where first contact 2.1.1, 2.2.1, 2.3.1, 2.4.1 and second contact 2.1.2, 2.2.2, 2.3.2 , 2.4.2 placed symmetrically with respect to the symmetry planes PS1, PS2, PS3, PS4 at the corresponding Hal...

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Abstract

The embodiments of the present invention involve vertical Hall effect devices.The vertical Hall effect device includes at least four Hall effect areas that are coupled with each other, and each of the at least four Hall effect areas has a relative first and second side.Each Hall effect area has the first contact and second contact on the first side. The first contact and the second contact in the corresponding Hall effect area are symmetrically plane and placed.Vertical vertical lines between the first contact between the corresponding Hall effect area and the second contact.Each Hall effect area has at least one contact area placed in the corresponding symmetrical plane area. Among them, the low Ohm connection device includes at least one low ohm connection path connecting the contact area connecting the Hall effect area.

Description

technical field [0001] Various embodiments of the present invention relate to a vertical Hall effect device and to a system including at least two vertical Hall effect devices. Background technique [0002] Hall effect devices are sensors that respond to magnetic fields. They generally suffer from offset error: the offset error is a non-zero output signal at zero applied magnetic field. A Hall effect device consists of one or more Hall effect regions with supply and signal terminals. The Hall effect occurs in the Hall effect region where the Lorentz force of a magnetic field on moving charge carriers produces a Hall electric field. The mobile charge carriers are supplied by a power source connected to the supply terminal. At the signal terminal, the output signal of the Hall effect device can be tapped. All terminals are ohmic contacts, which makes the Hall effect device a purely resistive device. A vertical Hall effect device (VHall) primarily responds to a magnetic fi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/06G01R33/07H10N52/00H10N52/80
CPCG01R33/077H10N52/101H10N59/00G01R33/0023H10B61/00H10N52/80
Inventor U·奥塞勒克纳
Owner INFINEON TECH AG