Micro-bridge structure of broadband high-absorption terahertz wave and fabrication method thereof

Abstract

The invention provides a micro-bridge structure of a broadband high-absorption terahertz wave and a fabrication method thereof, which belong to the technical field of imaging of a terahertz detection array at a room temperature and are used for solving the problem of low responsivity under a wide frequency band of a terahertz detector. The micro-bridge structure comprises a metal absorption film at a top layer, a metamaterial pattern at an intermediate layer and a micro electro-mechanical system (MEMS) micro bridge at a bottom layer, wherein silicon nitride dielectric layers are arranged among the metal absorption film, the metamaterial pattern and the MEMS micro bridge in a pairwise manner at intervals; the metal absorption film is an impedance-matching nano-scale metal absorption film; and the metamaterial pattern and the MEMS micro bridge jointly form a metamaterial absorption structure. By the impedance-matching nano-scale metal absorption thin film, the broadband absorption of the terahertz wave can be achieved, and high absorption of the terahertz can be guaranteed through the metamaterial absorption structure jointly formed by the metamaterial pattern and the MEMS micro bridge; the performance for broadband spectrum response and high absorption of the terahertz wave is achieved, and the responsivity of a micro-bridge structurized detection unit to the terahertz wave is comprehensively improved.

Description

technical field [0001] The invention belongs to the technical field of terahertz detection array imaging at room temperature, and in particular relates to a wide-band high-absorption terahertz wave microbridge structure and a preparation method thereof. Background technique [0002] Terahertz waves often refer to electromagnetic waves with a frequency of 0.1THz to 10THZ (wavelength 3mm to 30μm). Due to the special frequency band, which belongs to the transition range between macroelectronics and microphotonics, THz waves exhibit a series of unique properties different from other frequency band electromagnetic waves, making them widely used in military and civilian fields (such as imaging, communication, remote sensing, Radar, astronomy, biomedicine, etc.) have important scientific research value and wide application. Compared with other waves, terahertz waves have the following characteristics: (1) The frequency range of terahertz radiation is very wide, which almost covers...

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem of low response rate of current terahertz detectors in the wide frequency band, to design a micro-bridge structure with wide band and high absorption of terahertz waves and its preparation method, so as to realize wide spectrum and high detection of terahertz waves. Absorption, improving the response rate of the microbridge structure detection unit to terahertz waves

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