Three-dimensional shape measuring device

Abstract

The invention provides a three-dimensional shape measuring device, which has an outer frame of the air slider, a hollow shaft of the air slider capable of moving axially within the outer frame of the air slider, two supporting arms, two driving parts and two supporting parts. A through hole is provided in the hollow shaft of the air slider, and an optical path connecting the focusing optical system at the upper end and the detection part at the lower end is formed in the through hole. The support arms protrude symmetrically to both sides in the lateral direction with respect to the center axis of the hollow shaft of the air slider at the height of the combined center of gravity of the focusing optical system, the detection unit, and the hollow shaft. The drive unit is arranged symmetrically with respect to the central axis of the hollow shaft of the air slider at a position near the hollow shaft of the air slider of each support arm, and drives the hollow shaft of the air slider in the axial direction relative to the outer frame of the air slider. The support portion is disposed in each support arm at a position farther from the hollow shaft of the air slider than the driving portion, and symmetrically arranged with respect to the center axis of the hollow shaft of the air slider, and supports each support arm so as to be movable in the lateral direction.

Description

technical field [0001] The present invention relates to a three-dimensional shape measurement device for scanning and measuring an arbitrary three-dimensional shape measuring object (for example, an aspheric lens used in a smartphone, etc.) with high precision. Background technique [0002] like Figure 23 As shown, the following device is disclosed in Non-Patent Document 1. The detection part 201 is arranged at the lower end of the Z-axis driving shaft 220 of the Z-axis driving device 200 with gravity compensation in the Z-axis direction, and the detection part 201 is placed on the XY The three-dimensional shape of the measurement object 203 on the table 202 is measured. [0003] In this device, the Z-axis driving shaft 220 of the Z-axis driving device 200 is configured to be evacuated by the vacuum cylinder 204 on the upper part of the Z-axis driving device, thereby minimizing the self-weight of the Z-axis driving shaft 220 for compensation. The Z-axis drive shaft 220 is ...

AI Technical Summary

Problems solved by technology

Then, as a result, the rotational rigidity of the Z-axis driving shaft 220 becomes weak, and a measurement error ΔX is likely to occur at the front end of the detection part at a high inclination angle (30 degrees to 70 degrees).

In this way, in the conventional device in which the rotational rigidity of the Z-axis drive shaft 220 is weakened by thermal expansion, it is extremely difficult to realize the mm / s-level measurement expected in the lens production line.

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