Biaxial laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device
A technology of Raman spectroscopy and mass spectrometry imaging, which is applied in the directions of measuring devices, Raman scattering, and material excitation analysis, etc. Molecule, neutral ion and group detection and other problems, to achieve the effect of improving spatial resolution
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Embodiment 1
[0046] The embodiment of the present invention is based on image 3 The shown two-axis laser confocal LIBS, Raman spectrum-mass spectrum imaging device, the device uses a pulsed laser 30, a condenser lens 31 and a light-transmitting optical fiber 32 at the focal point of the condenser lens 31 to replace figure 1 Point Light 1 in . exist image 3 An exit beam attenuator 33 is introduced into the laser focusing system of the laser, and a detection beam attenuator 34 is introduced into the laser dual-axis confocal detection system.
[0047] like image 3 As shown, the dual-axis laser confocal LIBS and Raman spectrum-mass spectrometry imaging device includes a pulsed laser 30, a condenser lens 31, and a point light source 1 composed of a light-transmitting optical fiber 32 at the focal point of the condenser lens 31, along the direction of the incident optical axis 7 Placed collimator lens 2, outgoing beam attenuator 33, ring light generating system 4, measurement objective len...
Embodiment 2
[0071] like figure 2 In the dual-axis laser confocal LIBS and Raman spectroscopy-mass spectroscopy imaging device shown, the ring light generating system 4 can be replaced by a vector beam generating system 28 and a pupil filter 29 .
[0072] The radially polarized light longitudinal field tight focusing system composed of the vector beam generating system 28, the pupil filter 29 and the measuring objective lens 6 is used to compress the lateral size of the focused spot.
[0073] The remaining imaging measurement methods are the same as in Example 1.
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