Probe system multi-filed loading device

Abstract

The invention discloses a probe system multi-filed loading device, which comprises a multi-field loading box, a horizontal mobile platform, a cantilever rod, a fixed support with a slide rail, a transmission shaft, a servo motor, a probe and a force sensor, wherein the multi-field loading box is fixed on the horizontal mobile platform, a sample is fixed on a box bottom, a perform hole is sealed through a sealing rubber ring, the top portion of the probe is contacted with the sample, the bottom portion of the probe is connected with the force sensor, the force sensor is arranged in the front end of the cantilever rod, and is not contacted with the sealing rubber ring, the servo motor drives the transmission shaft to rotatably control the probe to vertically move, and achieves to load a force filed and a deformation field, the outer portion of the servo motor can be connected with a vacuum pump and a humidity controller, and a box body is embedded into a ring-shaped heating bar and an iron bar which twines a copper wire, is used to load a heating field and a magnetic filed, and loads an optical field through a panel. The probe system multi-filed loading device can supply load of vacuum degree, humidity, the force field, the deformation filed, an electric field, the heating field, the magnetic filed and the optical field, and is strong in anti-jamming ability and reliable and accurate in test result.

Description

technical field [0001] The invention relates to material measuring and testing equipment, in particular to a multi-field loading device for a probe testing system. Background technique [0002] In recent years, material science and technology have developed rapidly. Optical, electrical, magnetic, thermal, biochemical and other treatment processes enable materials to have excellent electrical, magnetic, optical, thermal, acoustic, mechanical, chemical, biological functions and mutual transformation. Functional materials have greatly promoted the development and application of functional materials. Functional materials such as conductive polymers, piezoelectric ceramics, optical fibers, optoelectronics, thermoelectrics, and magnetoelectrics have been widely used in electronic information, energy transportation, biomedicine, aerospace, Instrumentation and many other fields. [0003] The working environment of functional materials is more complicated than that of ordinary mater...

AI Technical Summary

Problems solved by technology

However, the current testing of materials using probe systems is mostly carried out in an open test environment. The probes and test samples are directly placed in the air environment for testing, which makes it easier to load light fields, electric fields, magnetic fields, force fields and strains. field, but it is impossible to test in humidity conditions, vacuum environment, etc., and it is easily disturbed by the external environment, which affects the reliability, accuracy and precision of the test results

When other probe systems are tested in a closed environment, although vacuum and humidity control can be achieved, multiple physical fields such as electricity, magnetism, heat, force, and light cannot be simultaneously load

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