Rotary shaft with a vent groove

A technology of ventilation slots and rotating shafts, which is applied in the direction of shafts, shafts and bearings, mechanical equipment, etc., and can solve problems such as the inability to ensure the effect of airflow delivery
CN105318129AInactive Publication Date: 2016-02-10ACM RES SHANGHAI
7 Cites 6 Cited by

Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
ACM RES SHANGHAI
Publication Date
2016-02-10
Estimated Expiration
Not applicable ยท inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a rotary shaft with a vent groove. Airflow can be conveyed into the vent groove in a rotary shaft body from air inlets in a fixed shaft sleeve. According to the technical scheme, air enters the vent groove through the air inlets in the shaft sleeve, is guided into the vent groove in the shaft body through annular air guiding space and is finally exhausted out of an air outlet in the bottom end of the shaft body. All air paths, communicated with the annular air guiding space, of the air inlets are independent in space and do not interfere with one another. One end of the vent groove is communicated with the annular air guiding space all the time, and therefore even though the shaft sleeve is fixed and the shaft body rotates always, the process that air is conveyed into the vent groove in the shaft body from the air inlets in the shaft sleeve cannot be influenced.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The present invention relates to a rotating shaft, in particular to a rotating structural device that requires air conduction. Background technique

[0002] In the equipment involved in the semiconductor wafer process, components such as rotating shafts are usually used, and in some process flows, it is necessary to convey the air flow through the rotating shaft. The current structure of the rotating shaft cannot guarantee the effect of air conveying. SUMMARY OF THE INVENTION

[0003] A brief summary of one or more aspects is presented below to provide a basic understanding of the aspects. This summary is not an exhaustive overview of all contemplated aspects and is neither intended to identify key or critical elements of all aspects nor attempt to delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later. ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More