A Vacuum Pressure Testing Method Based on Differential Pressure Sensor

Abstract

The invention discloses a vacuum pressure testing method based on a differential pressure sensor. A mode of connecting a pressure stabilization cavity onto a reference end C of the differential pressure sensor is adopted, a first valve between the pressure stabilization cavity and a tested experimental cavity is opened, and the pressure stabilization cavity and the tested experimental cavity are communicated; a second valve between the tested experimental cavity and a vacuum tank is opened, and the tested experimental cavity and the vacuum tank are communicated; the first valve connected onto the measurement cavity of the tested experimental cavity by the pressure stabilization cavity is closed; when the test is carried out, voltage values Ui and U0 of the differential pressure sensor and an absolute pressure sensor are acquired, the Ui and the U0 are converted to corresponding pressure values Pi and P0 according to a sensor standard fitting curve, and the pressure P' measured by the measurement end of the differential pressure sensor is equal to Pi+P0; and after the test, the first valve is opened first, the second valve is then closed, and the pressure stabilization cavity and the tested experimental cavity are then communicated. Thus, the problem of inaccurate test due to instable air flow of the reference end can be solved.

Description

technical field [0001] The invention relates to a vacuum pressure measurement technology, in particular to a vacuum pressure test method based on a differential pressure sensor. Background technique [0002] In the known publications and patents, the pressure is measured by means of a differential pressure sensor and an absolute pressure sensor, and the method of direct measurement is adopted. The disadvantage is that when the test occurs, the airflow changes sharply, causing the differential pressure sensor to be damaged. The actual pressure at the reference end is inconsistent with the pressure value obtained by the absolute pressure sensor measuring the reference end pressure of the differential pressure sensor, resulting in erroneous data. Contents of the invention [0003] The purpose of the present invention is to provide a vacuum pressure testing method based on a differential pressure sensor, which has high measurement accuracy and high sensor safety. [0004] In ...

AI Technical Summary

Problems solved by technology

[0002] In the known publications and patents, the measurement of pressure is realized by means of differential pressure sensor and absolute pressure sensor, and the method of direct measurement is adopted. The disadvantage is that when the test occurs, the airflow changes sharply, causing the differential pressure sensor to be damaged. The actual pressure at the reference end is inconsistent with the pressure value obtained by the absolute pressure sensor measuring the reference end pressure of the differential pressure sensor, resulting in erroneous data

Images