Reflection mirror supporting adjusting device

Abstract

The invention discloses a reflection mirror supporting adjusting device belonging to the reflection mirror surface shape detection technology field. The object of the invention is to solve the problems of the prior art such as single function and expensive prices. The reflection mirror supporting adjusting device comprises a rotating bearing, a sliding bench, two vertical plates, and a bottom plate. The two vertical plates are vertically and fixedly disposed on two opposite sides of the bottom plate, and the inner sides of the two vertical plates are provided with guiding grooves B. The sliding bench is disposed on the middle part of the bottom plate, and the side walls of the sliding bench opposite to the two vertical plates are provided with guiding grooves A, and in addition, the guiding grooves A in the two side walls of the sliding bench can respectively slide with respect to the guiding grooves B in the two vertical plates in a cooperated manner. The rotating bearing is vertically disposed on the middle position of the upper part of the sliding bench, and the reflection mirror is disposed on the upper end of the rotating bearing. The guiding grooves A are respectively in the shape of an arc, and the circle center of each of the arc-shaped guiding grooves A are concentric to the spherical surface of the reflection mirror. By adopting the reflection mirror supporting adjusting device, the rotation and the adjustment of the swinging posture of the tested reflection mirror can be realized.

Description

technical field [0001] The invention belongs to the technical field of mirror surface shape detection, and in particular relates to a mirror support adjustment device. Background technique [0002] In extreme ultraviolet lithography-related technologies, the surface shape detection accuracy of optical components has reached the sub-nanometer level, which puts extremely high requirements on optical detection technology. In the surface shape detection method of high-precision optical components, the optical component to be tested is required to be able to rotate around its center of rotation at a fixed angle, and to swing at a certain angle along the tangent direction of the spherical surface with the center of the spherical surface to be tested as the origin to achieve a multi-dimensional attitude. Adjustment. [0003] Most of the existing technologies are independent rotating mechanisms, turntables, linear displacement mechanisms, and tilt adjustment tables, etc., and there...

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to propose a reflector support adjustment device, which solves the problems of single function and high price in the prior art, realizes the support adjustment function of the tested reflector, makes the reflector rotate around the center of rotation at a fixed angle, and It can swing at a certain angle along the tangent direction of the spherical surface with the center of the spherical surface being tested as the origin

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