A plasma generating device for small space
A plasma and generating device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of large discharge source size, low discharge efficiency, uneven distribution of plasma, etc., and achieve high distribution density, high discharge efficiency, and uniform distribution Effect
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[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] as attached figure 1 Shown, the present invention is a kind of plasma generation device for small space, and this device comprises container 1, electrode 2 and magnet 3, and electrode 2 is placed in container 1, is connected with external power supply, and magnet 3 is arranged in container 1, The container 1 is filled with discharge gas.
[0022] The container 1 is a cavity structure made of non-metallic materials that do not contain halogen elements. The container 1 should have good airtightness when it is under negative pressure inside. The shape of the container 1 is determined according to the specific application, preferably a cube , cylinder and other regular shapes, the characteristic length of the container 1 should be greater than 2mm, the shape of the container 1 given in this embodiment is a cylindrical cavity structure, it...
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