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A plasma generating device for small space

A plasma and generating device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of large discharge source size, low discharge efficiency, uneven distribution of plasma, etc., and achieve high distribution density, high discharge efficiency, and uniform distribution Effect

Active Publication Date: 2019-05-17
BEIJING AEROSPACE INST OF THE LONG MARCH VEHICLE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of the above-mentioned prior art, the purpose of the present invention is to provide a plasma generating device for a small space, which is used to overcome the large size of the discharge source, low discharge efficiency, uneven distribution of plasma, and Disadvantages that it is difficult to apply plasma generation in small spaces

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  • A plasma generating device for small space

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Embodiment Construction

[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0021] as attached figure 1 Shown, the present invention is a kind of plasma generation device for small space, and this device comprises container 1, electrode 2 and magnet 3, and electrode 2 is placed in container 1, is connected with external power supply, and magnet 3 is arranged in container 1, The container 1 is filled with discharge gas.

[0022] The container 1 is a cavity structure made of non-metallic materials that do not contain halogen elements. The container 1 should have good airtightness when it is under negative pressure inside. The shape of the container 1 is determined according to the specific application, preferably a cube , cylinder and other regular shapes, the characteristic length of the container 1 should be greater than 2mm, the shape of the container 1 given in this embodiment is a cylindrical cavity structure, it...

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Abstract

The invention belongs to the technical field of plasma generation, and specifically relates to a plasma generation device for a small space. The device comprises a container, electrodes and magnets; and the container has a hollow cavity structure made of a non-metallic material which does not contain a halogen element, the electrodes are disposed in the container and connected with an external power supply, the magnets are symmetrically arranged in the container, and the container is filled with a discharging gas. When the external power supply powers the electrodes, a strong electric field is formed between the electrodes, the strong electric field enables the discharging gas to be ionized, and plasmas are formed in the container; and the plasma generation device can be applied to a small scale space and can generate the stable, uniformly-distributed and high-density plasmas, and discharging efficiency is high.

Description

technical field [0001] The invention belongs to the technical field of plasma generation, in particular to a plasma generation device used in a small space. Background technique [0002] The time-varying control of plasma has a wide range of application values ​​for stealth, antennas, etc., and the generation technology of small-scale, high-density plasma is the key core of time-varying control of plasma, which has a wide range of military and civilian values. [0003] Existing plasma generation technologies include DC discharge, radio frequency capacitive discharge, radio frequency induction discharge, microwave discharge, microwave ECR discharge, helical wave discharge, surface wave discharge, etc. These methods are generally aimed at industrial purposes, such as plasma surface treatment, coating, For semiconductor technology, etc., for time-varying control applications, there are common problems such as large discharge source size, low discharge efficiency, and uneven pla...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/24
Inventor 张生俊刘佳琪孟刚刘鑫王明亮王伟东李亚男邬润辉艾夏梁伟王同权刘生东张陆萍
Owner BEIJING AEROSPACE INST OF THE LONG MARCH VEHICLE