A gas filter device placed in front of vacuum obtaining equipment

Abstract

The invention relates to the technical field of vacuum, in particular to a gas filtering device arranged in front of vacuum pumping equipment. The gas filtering device comprises an upper-stage filter, a middle connecting disc and a lower-stage filter. A lower-stage air inlet is formed in the lower end of the lower-stage filter. The upper end of the lower-stage filter is connected with the bottom of the upper-stage filter. An upper-stage air outlet is formed in the top of the upper-stage filter. The middle connecting disc is arranged at the bottom of the upper-stage filter. A plurality of through holes enabling the upper-stage filter to communicate with the lower-stage filter are formed in the middle connecting disc in the circumferential direction. Trundles are arranged at the bottom of the lower-stage filter. The lower-stage air inlet is connected with a pumped air source. The upper-stage air outlet is connected with a vacuum pump. The gas filtering device arranged in front of the vacuum pumping equipment is high in working efficiency, the maintenance interval is long, and the interiors of the filters can be cleaned easily.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to a gas filtering device pre-installed in vacuum obtaining equipment. Background technique [0002] Vacuum pumps work in a wide range of fields, and the actual process is complex and changeable. If the dust, water and oil vapor contained in the pumped gas enters the vacuum pumping system, it will bring great harm to the equipment, affect production, and increase equipment maintenance costs and cycles. A gas filter in front of the pump is beneficial to protect the vacuum pump, and is also beneficial to keep the exhaust clean of the entire exhaust system. [0003] At present, most filters adopt a single-stage, cylindrical filter element, a simple up-and-down arrangement of air intake and air outlet, a single filter medium, and no pressure monitoring. The disadvantages are: single function, low efficiency, small power-to-body ratio, short maintenance intervals, and difficulty in clea...

AI Technical Summary

Problems solved by technology

[0003] At present, most filters adopt a single-stage, cylindrical filter element, a simple up-and-down arrangement of air intake and air outlet, a single filter medium, and no pressure monitoring.

Disadvantages are: single function, low efficiency, small power-to-body ratio, short maintenance intervals, and difficulty in cleaning the inside of the filter

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