The invention discloses a double-plate or double-side
film coating system comprising a plurality of vacuum chambers in linear arrangement, wherein a through hole is formed between any two adjacent vacuum chambers; the first
vacuum chamber is a plate inlet chamber; the last
vacuum chamber is a plate outlet chamber; at least one
film coating chamber is arranged between the plate inlet chamber and the plate outlet chamber; chamber
doors are arranged on chamber walls on two sides of the
film coating chamber in the workpiece conveying direction; and a magnetron
sputtering target is arranged on each chamber door. The double-plate or double-side film
coating system adopts the vacuum chambers in linear arrangement, and the magnetron
sputtering targets are arranged on the chamber
doors on two sides of each film
coating chamber, so that film
coating on two sides of a workpiece or on two workpieces can be realized at the same time, which effectively improves the production efficiency of a film coating
production line; meanwhile, the magnetron
sputtering targets are arranged on the chamber
doors respectively, so that the equipment maintenance is facilitated, and the magnetron sputtering targets are simple to
mount.