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Operation control device and method of vacuum pumps

A technology of operation control and vacuum pump, which is applied in the direction of pump control, mechanical equipment, pump components, etc., can solve the problems of increasing pump failure frequency, pump and ancillary facility maintenance frequency and maintenance man-hours, energy consumption and maintenance cost increase, so as to promote maintenance Work efficiency, reduce power consumption, significant cost-effective effects

Inactive Publication Date: 2008-03-19
ANEST IWATA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, driving multiple sets of pumps results in increased energy consumption and maintenance costs
In addition, installing multiple pumps will increase the frequency of pump failures, the frequency of repairs and man-hours for pumps and ancillary facilities

Method used

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  • Operation control device and method of vacuum pumps
  • Operation control device and method of vacuum pumps
  • Operation control device and method of vacuum pumps

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Embodiment Construction

[0033] Hereinafter, the present invention will be described in detail with reference to embodiments shown in the accompanying drawings. However, the dimensions, materials, shapes, relative positions, etc. of the components described in these embodiments are merely illustrative, and should not be construed as limiting the scope of the present invention unless any special statement is made.

[0034] Fig. 1 has shown the overall composition of the present invention, wherein vacuum cabinet 1 is made of three vacuum pumps P A ,P B and P c stress reliever. Vacuum pump P A ,P B and P c respectively by motor M A , M B and M C drive. In the vacuum cabinet 1 with each vacuum pump P A ,P B and P c Place the solenoid on / off valve V between A , V B and V C . Each vacuum pump P A ,P B and P C It is a rotary displacement (volume) type, such as a scroll type or a vane type.

[0035] Each motor M A , M B and M C Powered by power supply 3. Because each motor M A , M B an...

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PUM

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Abstract

An operation control devices and operation methods thereof so as to eliminates the difficulties in such a case of introduction of vacuum sensors and / or inverter control is disclosed. The disclosure relates to a control of plural sets of vacuum pumps. In order to comply with the subjects to overcome the difficulties, the disclosure proposes to utilize current detection approach instead of direct pressure detection approach, while showing how to estimate a vacuum degree achieved under the operation of the pumps as well as presenting a method on the control of the number of pumps. It is also described how organically a current detecting device, a vacuum degree estimating device, a working pump control device and related methods to satisfy the subjects are linked. The usefulness of the disclosure is also revealed.

Description

technical field [0001] The present invention relates to an operation control device and an operation control method of a vacuum pump such as a scroll pump, a vane pump, etc., and particularly relates to a case where a plurality of sets of vacuum pumps are provided. Background technique [0002] In the conventional operation control method for vacuum pumps such as scroll pumps, vane pumps, etc., frequency control performed by an inverter is introduced, and the drive is controlled using a signal from a pressure sensor that detects the gas pressure inside the depressurized vacuum cabinet. The speed of the AC motor of the vacuum pump. For pump load control performed by means of an inverter, prior art such as JP-A-H9-4591 / 1997 (hereinafter referred to as Patent Document 1) is known. [0003] As shown in FIG. 5 , Patent Document 1 shows a control step constitution in which the speed of an AC motor 04 driving a vacuum blower (vacuum pump) 03 connected to a vacuum cabinet 01 is con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B49/06
CPCF04C2270/07F04C28/06F04C2270/56F04C2240/403F04C28/02
Inventor 中山贵光佐藤和昭
Owner ANEST IWATA CORP
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