47results about How to "Efficiently exposed" patented technology

A lithography reticle advantageously includes “proximity effect halos” around tight tolerance features. During reticle formation, the tight tolerance features and associated halos can be carefully written and inspected to ensure accuracy while the other portions of the reticle can be written/inspected less stringently for efficiency. A system for creating a reticle data file from an IC layout data file can include a processing module and a graphical display. The processing module can read the IC layout data file, identify critical features and define a halo region around each of the critical features. The graphical user interface can facilitate user input and control. The system can be coupled to a remote IC layout database through a LAN or a WAN.

A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

Aspects of the invention can provide a patterning forming method capable of patterning a thin film by a simple and inexpensive device. The thin film can be provided on a base member including a photothermal conversion material that converts optical energy into thermal energy and light is radiated onto the base member to remove the thin film corresponding to a light-radiated region, such that the thin film is patterned.

Metal oxide nanowires and carbon-coated metal nanowires are effective as supports for particles of an expensive catalyst material, such as platinum metal group catalyst. Such supported catalysts are useful when included in an electrode on, for example, a proton exchange membrane in a hydrogen/oxygen fuel cell. For example, tin oxide nanowires are formed on carbon fibers of carbon paper and platinum nanoparticles are deposited on the tin oxide nanowires. The nanowires provide good surfaces for effective utilization of the platinum material.

The present invention includes a first and a second optical path forming member arranged within a path of light beams from a light source; a first mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the first optical path forming member, and a second mounting table provided such that the edge portion of the substrate is located within an application region of the light beams from an outlet side of the second optical path forming member, each of the mounting tables being configured to be rotatable about a vertical axis while mounting the substrate thereon; and a light blocking means for blocking application of light from each of the first and second optical path forming members. A common light source can be used to perform edge exposure for the substrates on the first and second mounting tables, for example, at the same time, so that a high processing ability can be offered and an increase in size of the apparatus can be prevented.

Devices and methods for performing assays on materials, particularly biological materials, are provided. The devices and methods make use of self-sealing members, which can be applied to a flat surface to form wells to facilitate immobilization of materials on the flat surface, then removed to yield a flat surface that facilitates the performance of processes on and/or detection of the immobilized material.

An exposure apparatus for efficiently exposing patterns onto corresponding regions of a substrate. The apparatus includes a first wafer stage, a second wafer stage, an alignment sensor which detects marks of wafers on the wafer stages, a projection optical system which irradiates a first region of a wafer with first exposure light, and an imperfect shot region exposure system which irradiates a second region of a wafer that differs from the first region with second exposure light. The imperfect shot region exposure system irradiates the second region of a wafer held on the second wafer stage with the second exposure light.

In a replacement gate approach, the exposure of the placeholder material of the gate electrode structures may be accomplished on the basis of an etch process, thereby avoiding the introduction of process-related non-uniformities, which are typically associated with a complex polishing process for exposing the top surface of the placeholder material. In some illustrative embodiments, the placeholder material may be exposed by an etch process based on a sacrificial mask material.

An exposure apparatus exposes a substrate using light from a light source having a wavelength of 20 nm or smaller, and includes plural optical elements, each of which is configured to reflect the light, plural vacuum chambers, each of which houses one or more of the plural optical elements, and a gas supplier configured to supply to each vacuum chamber independently a gas used to inhibit contaminations that could occur on the optical element housed in each vacuum chamber, wherein the gas supplier supplies different types of gases to the plural vacuum chambers according to an illuminance of an illumined region on the optical element housed in each vacuum chamber.

Devices and methods for performing assays on materials, particularly biological materials, are provided. The devices and methods make use of self-sealing members, which can be applied to a flat surface to form wells to facilitate immobilization of materials on the flat surface, then removed to yield a flat surface that facilitates the performance of processes on and/or detection of the immobilized material.

A brushcutter includes: a centrifugal clutch (20) that transmits a drive force of an engine from a crankshaft to a drive shaft; a clutch housing (23) covering the cooling fan and the centrifugal clutch, the clutch housing being made of a synthetic resin; and a bearing that is held inside the clutch housing (23) and supports a coupling shaft that couples the drive shaft and the centrifugal clutch (20). A volute-shaped air-flow space (27) defined including a rise wall (26) surrounding the centrifugal clutch (20) is provided inside the clutch housing (23) near an outer circumference of the centrifugal clutch (20). An inflow opening (28, 29) that lets a cooling air flowing in the air-flow space (27) flow into an inner air-flow space (53) and an outflow opening (52) that lets the cooling air flowing in the air-flow space (53) flow out to the air-flow space (27) are provided on the rise wall (26).

The present invention provides a manufacturing method of a bearing ring member such as an outer ring comprising an installation portion on the outer peripheral surface and a double row of outer-ring raceways on the inner peripheral surface, in which a raw material is processed to obtain a final stage intermediate member through a first upsetting process, a forward-backward extrusion process, a second upsetting process, a burr removing process, and a punching process, wherein a movable die which leaves a stationary die in the final step is used in the second upsetting process, and the excess metal material is moved toward outside in the radial direction to a portion which become the installation section and a burr formation section, exposing a high pure metal material at least in a portion where the load of rolling bodies acts so as to ensure the rolling fatigue life of the both of outer-ring raceways.

Devices and methods for performing assays on materials, particularly biological materials, are provided. The devices and methods make use of self-sealing members, which can be applied to a flat surface to form wells to facilitate immobilization of materials on the flat surface, then removed to yield a flat surface that facilitates the performance of processes on and/or detection of the immobilized material.

A package has two panels, one of which is a base part having at least one bubble that is intended for storage purposes. The bubble projects from an underside of the panel of the base part and opens into an opening in the upper side thereof. The other panel is a cover that is connected with the base part via a hinge in order to be rotatable between a raised position, in which the interior of the bubble is accessible, and a lowered position in which the panel of the cover covers the opening of the bubble. The panels of the base part and cover are each formed with two seats that in the lowered position of the cover are laterally and equidistantly separated from the bubble. The package allows exposure of information of one or two storage objects, while being stacked together with other packages in a compact pile.