Composite ionization source for vacuum ultraviolet light ionization and chemical ionization
A technology of vacuum ultraviolet light source and vacuum ultraviolet light, which is applied to the parts of ion source/gun, particle separator tube, etc., can solve the problems of limited chemical ionization sensitivity, unfavorable reagent ion strength, short residence time, etc. Detection Sensitivity, Increased Residence Time, Wider Range Effects
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[0024] Such as figure 1 As shown, a vacuum ultraviolet photoionization and chemical ionization composite ionization source based on ion funnel radio frequency electric field enhancement, including a vacuum ultraviolet light source 1, an ionization chamber cavity 2, two or more transmission electrodes 4, and a metal grid 5 And the ion funnel 6 is provided with a sample gas capillary 3 interface, a reagent gas capillary 10 interface, a vacuum gauge 7 interface and a mechanical vacuum pump 8 exhaust ports on the ionization chamber cavity 2 walls.
[0025] The transmission electrode 4 is placed inside the ionization chamber cavity 2 and consists of four electrodes with a spacing of 3 mm. The transmission electrodes 4 have through holes in the axial direction. The transmission electrodes 4 are arranged parallel to each other at intervals, and the through holes are coaxial.
[0026] An ultraviolet light inlet is provided on the wall of the ionization chamber cavity 2 above the throu...
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