Micron LED array based visible light communication system and construction method thereof
A technology of LED array and visible light communication, applied in short-range systems, free space transmission and other directions, can solve the problems of limiting the communication distance and practicability of micron LEDs, small output optical power of micron LEDs, and limiting communication speed, etc., and achieves strong practicality. high communication speed, high photoelectric modulation bandwidth effect
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[0032] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art. The present invention will be further described below in conjunction with the examples, but the present invention is not limited to the following examples.
[0033] (a) Fabrication of micro-LED arrays, figure 1 The upper figure in the schematic diagram is a top view, and the lower figure is a section view:
[0034] like figure 1 As shown, the GaN-based LED epitaxial layer is grown on the c-surface of the sapphire substrate, the p-type ohmic contact electrode Ni / Au (10nm / 25nm) is deposited, and the Ni / Au and a part of the GaN epitaxial layer are respectively etched away by reactive ion etching. The epitaxial layer is etched to a depth of 1 μm to expose the n-GaN 12, forming a micro-LED array mesa 13 with a length and width of...
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