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Terahertz artificial birefringence device based on periodically chirped grating

A chirped grating and birefringence technology, applied in the field of terahertz science, can solve the problems of non-linear effect of phase delay, small birefringence coefficient, narrow working bandwidth, etc., to improve birefringence coefficient and birefringence bandwidth, improve transmission Efficient, easy to prepare effects

Inactive Publication Date: 2018-05-11
NANKAI UNIV
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Problems solved by technology

[0005] The purpose of the present invention is to provide a terahertz artificial birefringent device based on a periodically chirped grating, which solves the problem of terahertz phase delay and polarization conversion devices with small birefringence coefficient, large dispersion, narrow working bandwidth and nonlinear phase delay in the background technology. Key technical issues such as high effect and loss

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  • Terahertz artificial birefringence device based on periodically chirped grating
  • Terahertz artificial birefringence device based on periodically chirped grating
  • Terahertz artificial birefringence device based on periodically chirped grating

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Embodiment Construction

[0020] Structure, principle and method of use of the present invention are illustrated as examples:

[0021] The structure of the device is as figure 1 As shown, the photolithography and reactive ion beam etching process are used to prepare such as figure 1 (a) Relief-type grating structure. Ion beam etching results in alternately arranged grid ridges and grid grooves, such as figure 1 As shown in (c), the etching depth of the grid groove is 120 μm, the verticality of the side wall of the grid ridge is 2°, and the width of all grid ridges is 30 μm. A pair of grid ridges and grid grooves form a grid, and 10 grids with gradually changing width The grids are arranged sequentially to form a chirped grid group. Such as figure 1 As shown in (b), the grid groove width in a chirped grid group increases from 30 μm, 40 μm, 50 μm, etc. in an arithmetic sequence, and a chirped grid group is on the order of 950 μm. 10 identical chirped grating groups are arranged periodically to form ...

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Abstract

The invention discloses a terahertz artificial birefringence device based on a periodic chirped grating. According to the terahertz artificial birefringence device, an artificial birefringence effect is formed through etching a submillimeter-scale relief grating structure on the surface of a high-resistance silicon chip, thereby realizing functions of terahertz wave phase shift and polarization state transition. According to the device, a specific period chirped structure is adopted. Not only is periodicity of the grating kept, but also the chirped structure is introduced. Compared with a common periodic grating, the terahertz artificial birefringence device is advantageous in that the birefringence coefficient and the birefringence bandwidth of the device are improved; a high birefringence coefficient which is larger than 0.35, broadband birefringence flatness and a good linear phase shift characteristic are realized in a terahertz waveband; a highest phase shift coefficient reaches deltaphi=1.6pi; and polarization conversion rate exceeds 99% when the terahertz artificial birefringence device is used as a one-half wave plate. Compared with a metal grating and a metal hypersurface structure, the terahertz artificial birefringence device is made of a full dielectric material and greatly improves transmittance of the device; low loss and broad band are realized; and the terahertz artificial birefringence device can be widely used for regulating terahertz wave phase and polarization.

Description

technical field [0001] The invention belongs to the field of terahertz science and technology, and in particular relates to a terahertz artificial birefringence device based on a periodically chirped grating. Background technique [0002] Terahertz wave refers to the frequency between 0.1-10THz (1THz=10 12 THz, corresponding to electromagnetic waves with a wavelength in the range of 3 mm to 30 μm, this band is between microwaves and light waves, and is an intersecting field between electronics and photonics. Due to its special position in the electromagnetic spectrum, terahertz waves have many superior characteristics such as perspective, safety, and high signal-to-noise ratio, and have very important academic and application values ​​in the fields of spectroscopy, imaging, and communication. These terahertz application systems are inseparable from the support of terahertz functional components such as filtering, modulation, phase shifting, and polarization conversion. Pha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18G02B5/30
CPCG02B5/1809G02B5/3083
Inventor 范飞陈猛常胜江
Owner NANKAI UNIV
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