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Electrostatic chuck system

An electrostatic chuck and electrode technology, applied in the direction of holding devices, circuits, electrical components, etc. that apply electrostatic attraction

Active Publication Date: 2016-10-12
SAMSUNG DISPLAY CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it may contain information which does not form prior art

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  • Electrostatic chuck system
  • Electrostatic chuck system
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Embodiment Construction

[0036] Reference will now be made in detail to the exemplary embodiments of the inventive concept, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the inventive concepts may have different forms and should not be construed as limited to the descriptions set forth herein. Accordingly, the exemplary embodiments are merely described below, by referring to the figures, to explain aspects of the inventive concept. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one", when placed before a list of elements, modify the entire list of elements and do not modify the individual elements of the list. Additionally, the use of "may" when describing embodiments of the inventive concept means "one or more embodiments of the invention." In addition, the term "exemplary" means to illustrate or illust...

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Abstract

Provided is an electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate arranged on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second polarities.

Description

[0001] Cross References to Related Applications [0002] This application claims priority and benefit from Korean Patent Application No. 10-2015-0042366 filed with the Korean Intellectual Property Office on March 26, 2015, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0003] One or more exemplary embodiments of inventive concepts relate to an electrostatic chuck system. Background technique [0004] Currently, mobile electronic devices are widely used. In addition to compact electronic devices such as mobile phones, tablet personal computers (PCs) are widely used. [0005] Mobile electronic devices provide various functions and / or utilities by including a display device for providing visual information such as images or videos. Recently, as components for driving display devices have become smaller (eg, miniaturized), the importance of display devices in electronic equipment has further increased. In addition, a structure i...

Claims

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Application Information

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IPC IPC(8): H01L21/683H01L27/32
CPCH01L21/683H01L21/6833H10K59/00H01L21/6831H10K59/35H10K50/8445H10K2102/311H10K71/00H02N13/00
Inventor 李德重尹基泳朴正善
Owner SAMSUNG DISPLAY CO LTD
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