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Two-degree of freedom micropositioning platform
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A technology of micro-positioning platform and degree of freedom, which is applied to the parts of the instrument, instruments, etc., can solve the problems of reduced coupling and large size, and achieve the effects of reduced coupling, small size and high positioning accuracy
Active Publication Date: 2016-10-26
KUNMING UNIV OF SCI & TECH
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[0003] The invention provides a two-degree-of-freedom micro-positioning platform, which is used to solve the problem of large volume of traditional equipment, and at the same time reduce the coupling when moving in the X direction and the Y direction
Method used
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Embodiment 1
[0019] Embodiment 1: as Figure 1-3 As shown, a two-degree-of-freedom micro-positioning platform includes a motion platform 1, a base 2, an arc-shaped guiding mechanism I3, an arc-shaped guiding mechanism II4, an arc-shaped guiding mechanism III5, an arc-shaped guiding mechanism IV6, fixing bolt holes I7, Fixing bolt hole Ⅱ8, fixing bolt hole Ⅲ9, fixing bolt hole Ⅳ10, lever fixing bolt hole Ⅰ11, lever fixing bolt hole Ⅱ12, Y direction lever Ⅰ13, X direction piezoelectric ceramic drive rectangular slot 14, Y direction flexible hinge Ⅰ15, Y direction Rectangular slot 16 for the piezoelectric ceramic driver in the direction, Y direction flexible hinge II 17, Y direction flexible hinge III 18, X direction flexible hinge I 19, X direction flexible hinge II 20, X direction flexible hinge III 21, X direction lever I 22, Y direction lever II 23, Y direction lever Ⅲ24, Y direction lever Ⅳ25, X direction lever Ⅱ26, X direction lever Ⅲ27, X direction lever Ⅳ28, Y direction flexible hinge...
Embodiment 2
[0024] Embodiment 2: as Figure 1-3 As shown, a two-degree-of-freedom micro-positioning platform includes a motion platform 1, a base 2, an arc-shaped guiding mechanism I3, an arc-shaped guiding mechanism II4, an arc-shaped guiding mechanism III5, an arc-shaped guiding mechanism IV6, fixing bolt holes I7, Fixing bolt hole Ⅱ8, fixing bolt hole Ⅲ9, fixing bolt hole Ⅳ10, lever fixing bolt hole Ⅰ11, lever fixing bolt hole Ⅱ12, Y direction lever Ⅰ13, X direction piezoelectric ceramic drive rectangular slot 14, Y direction flexible hinge Ⅰ15, Y direction Rectangular slot 16 for the piezoelectric ceramic driver in the direction, Y direction flexible hinge II 17, Y direction flexible hinge III 18, X direction flexible hinge I 19, X direction flexible hinge II 20, X direction flexible hinge III 21, X direction lever I 22, Y direction lever II 23, Y direction lever Ⅲ24, Y direction lever Ⅳ25, X direction lever Ⅱ26, X direction lever Ⅲ27, X direction lever Ⅳ28, Y direction flexible hinge...
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Abstract
The invention relates to a two-degree of freedom micropositioning platform, and belongs to the field of micro / nano electromechanical systems. An X-direction lever IV is connected with an X-direction lever III through an X-direction flexible hinge III. The X-direction lever III is connected with an X-direction lever II through an X-direction flexible hinge II. The X-direction lever II is connected with a movement platform through an X-direction flexible hinge I. The X-direction lever III is also connected with an X-direction lever I through an X-direction flexible hinge IV. A Y-direction I is connected with a Y-direction lever III through a Y-direction flexible hinge III. The Y-direction lever III is connected with a Y-direction lever II through a Y-direction flexible hinge IV. The Y-direction lever II is connected with the movement platform through a Y-direction flexible hinge I. The Y-direction lever III is also connected with a Y-direction lever IV through a Y-direction flexible hinge II. The two-degree of freedom micropositioning platform is compact in structure, and small in size, and coupling in moving in the X direction and Y direction is effectively reduced.
Description
technical field [0001] The invention relates to a two-degree-of-freedom micro-positioning platform, which belongs to the field of micro / nano electromechanical systems. Background technique [0002] Micro-positioning platform technology has a wide range of applications in precision manufacturing, ultra-precision measurement, micro-operation and many other fields. At present, with the continuous development of the above-mentioned fields, the requirements for positioning accuracy are getting higher and higher. At the same time, the requirements for strokes have also developed from the original tens of microns to one hundred microns and above. However, the traditional large-stroke micro-positioning platform generally has the disadvantages of being too large and the platform is not easy to process. For a platform with two degrees of freedom, there is generally an input-output coupling problem, which affects the positioning accuracy, and the decoupling problem needs to be conside...
Claims
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