A single row two-dimensional time grating linear displacement sensor

A linear displacement, single-row technology, used in instruments, measuring devices, electrical devices, etc., can solve the problems of difficult manufacturing, multiple layers, complex sensor structure, etc., to reduce the number of layers and the complexity of winding, The effect of eliminating the influence of high-order harmonics and simplifying the sensor structure

CN106441058BActive Publication Date: 2018-11-13CHONGQING UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2018-11-13

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Abstract

The invention discloses a single-row two-dimensional time grating linear displacement sensor, comprising a fixed ruler and a moving ruler, wherein the fixed ruler comprises a fixed ruler body as well as first and second excitation coils adopting rectangular wave winding, and the moving ruler comprises a moving ruler body as well as first, second, third and fourth induction coils adopting a half-sine winding manner; excitation current is introduced into the first and second excitation coils; when the moving ruler moves relative to the fixed ruler, the first, second, third and fourth induction coils output four paths of induction signals; the induction signals output by the first induction coil shift the phase 90 degrees and then are superposed with the induction signals output by the second induction coil to form X-directional traveling wave signals, the induction signals output by the third induction coil shift the phase 90 degrees and then are superposed with the induction signals output by the fourth induction coil to form Y-directional traveling wave signals, the traveling wave signals are compared with same-frequency reference signals in phase, the phase difference is expressed by the number of interpolated high-frequency clock pulses, and linear displacements in the X and Y directions are obtained after conversion. The sensor is simple in structure and high in measurement resolution.
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Description

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a single-row two-dimensional time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, which exists in a large number of industrial and scientific practices represented by the manufacturing industry, among which linear plane displacement measurement is a typical application, often used in machine tools that need to measure X and Y coordinates at the same time equipment and a flat workbench. At present, the two-dimensional displacement measurement of the plane is mainly divided into two forms, one is to install linear displacement sensors in the X direction and the Y direction to realize the measurement of the two-dimensional displacement of the plane, and the other is to use an integrated two-dimensional linear displacement sensor. Such as two-dimensio...

Examples

Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] Such as Figure 1 to Figure 5 The shown single-row two-dimensional time grating linear displacement sensor includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0020] The scale 1 includes a scale base 11, a first excitation coil 12 arranged in the first wiring layer on the side of the scale base 11 facing the moving scale, a second wiring layer 14 arranged on the first wiring layer, and a second wiring layer 14 arranged on the first wiring layer. The second excitation coil 13 in the second wiring layer 14 and the scale insulating layer 15 arranged on the second wiring layer 14, the first excitation coil 12 and the second excitation coil 13 are insulated from each other and do not interfere with each other, fixed The projection of the scale base 11 can completely cover the first and second excitation coils. The sc...