A single row two-dimensional time grating linear displacement sensor

Abstract

The invention discloses a single-row two-dimensional time grating linear displacement sensor, comprising a fixed ruler and a moving ruler, wherein the fixed ruler comprises a fixed ruler body as well as first and second excitation coils adopting rectangular wave winding, and the moving ruler comprises a moving ruler body as well as first, second, third and fourth induction coils adopting a half-sine winding manner; excitation current is introduced into the first and second excitation coils; when the moving ruler moves relative to the fixed ruler, the first, second, third and fourth induction coils output four paths of induction signals; the induction signals output by the first induction coil shift the phase 90 degrees and then are superposed with the induction signals output by the second induction coil to form X-directional traveling wave signals, the induction signals output by the third induction coil shift the phase 90 degrees and then are superposed with the induction signals output by the fourth induction coil to form Y-directional traveling wave signals, the traveling wave signals are compared with same-frequency reference signals in phase, the phase difference is expressed by the number of interpolated high-frequency clock pulses, and linear displacements in the X and Y directions are obtained after conversion. The sensor is simple in structure and high in measurement resolution.

Description

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a single-row two-dimensional time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, which exists in a large number of industrial and scientific practices represented by the manufacturing industry, among which linear plane displacement measurement is a typical application, often used in machine tools that need to measure X and Y coordinates at the same time equipment and a flat workbench. At present, the two-dimensional displacement measurement of the plane is mainly divided into two forms, one is to install linear displacement sensors in the X direction and the Y direction to realize the measurement of the two-dimensional displacement of the plane, and the other is to use an integrated two-dimensional linear displacement sensor. Such as two-dimensio...

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