A single-row and double-row two-dimensional time grating linear displacement sensor

Abstract

The invention discloses a single-column dual-row type two-dimensional time grating linear displacement sensor. The sensor comprises a fixed scale and a movable scale. The fixed scale comprises a fixed scale base body and first and second excitation coils adopting rectangular wave winding. The movable scale comprises a movable scale base body and first, second, third and fourth induction coils wound in a half-sine winding mode. Excitation current is introduced into the first and second excitation coils, when the movable scale moves relative to the fixed scale, an induction signal output by the first induction coil is subjected to phase shift by 90 degrees and overlapped with an induction signal output by the second induction coil to form an X-direction travelling wave signal, an induction signal output by the third induction coil is subjected to phase shifting by 90 degrees and then overlapped with an induction signal output by the fourth induction signal to form an Y-direction travelling wave signal, the X-direction and Y-direction travelling wave signals are subjected to phase comparison with reference signals at the same frequency, the phase difference is shown by the number of interpolation high frequency clock pulses, and linear displacements of the X direction and the Y direction can be obtained after conversion. The sensor is simple in structure, high in measurement resolution, easy to manufacture in batches and low in cost.

Description

Technical field [0001] The invention belongs to the technical field of precision measurement sensors, and specifically relates to a single-row double-row two-dimensional time-grid linear displacement sensor. Background technique [0002] Linear displacement measurement is the most basic geometric quantity measurement. It exists in many industrial and scientific practices represented by the manufacturing industry. Among them, linear plane displacement measurement is a typical application. It is often used for machine tools that need to measure both X and Y coordinates. Equipment and flat workbench. At present, there are two main types of planar two-dimensional displacement measurement. One is to install linear displacement sensors in the X direction and Y direction to realize the measurement of planar two-dimensional displacement, and the other uses an integrated two-dimensional linear displacement sensor. Such as two-dimensional grating sensor, two-dimensional magnetic grating s...

AI Technical Summary

Problems solved by technology

At present, the two-dimensional time grating linear displacement sensor that has been developed has many layers and complex winding of the excitation coil, which makes the structure of the sensor more complex, difficult to manufacture and high in cost, and the measurement accuracy of the sensor is also affected by the number of turns of the excitation coil. and the influence of the distribution of each turn coil

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